Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan

International Conference on Optical MEMS and Nanophotonics

Volumn , Issue , 2012, Pages 158-159

  Liu, Lin ^a   Xie, Huikai ^a  

^a University of Florida   (United States)

Author keywords

3D confocal microscopy; electrothermal; MEMS lens scanner; MEMS mirror

Indexed keywords

CONFOCAL IMAGE; CONFOCAL SCANNING MICROSCOPES; ELECTROTHERMAL; LOW DRIVING VOLTAGE; MEMS MIRRORS; MEMS SCANNER; TWO-AXIS;

CONFOCAL MICROSCOPY; MIRRORS; MOEMS; NANOPHOTONICS; SCANNING; THREE DIMENSIONAL COMPUTER GRAPHICS;

THREE DIMENSIONAL;

EID: 84869167299     PISSN: 21605033     EISSN: 21605041     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2012.6318851     Document Type: Conference Paper

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