Numerical analysis and demonstration of a 2-DOF large-size micromirror with sloped electrodes

Journal of Micromechanics and Microengineering

Volumn 21, Issue 9, 2011, Pages

  Jin, Joo Young ^a   Park, Jae Hyoung ^b   Yoo, Byung Wook ^a   Jang, Yun Ho ^a   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

^b Dankook University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; BOTTOM ELECTRODES; BOTTOM LAYERS; LARGE SIZES; MICRO MIRROR; MIRROR SIZE; PLATE ACTUATION; REDUCED ACTUATION; SINGLE CRYSTALLINE SILICON; SLOPE ANGLES; TILT ANGLE; TWO LAYERS; TWO-DEGREE-OF-FREEDOM;

MIRRORS; NUMERICAL ANALYSIS;

ELECTRODES;

EID: 80052195477     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/9/095006     Document Type: Article

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