Micromachined lens microstages for two-dimensional forward optical scanning

Optics Express

Volumn 18, Issue 15, 2010, Pages 16133-16138

  Park, Hyeon Cheol ^a   Song, Cheol ^a   Jeong, Ki Hun ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; LENSES; OPTICAL INSTRUMENTS;

EFFECTIVE BEAMS; GLASS LENS; HAND-HELD PROJECTORS; LASER SCANNING; LOW OPERATING VOLTAGE; MEMS ACTUATION; MICROMACHINED; NEW DIRECTIONS; OPTICAL PATH; PISTON MOTION; SCANNING MODULE;

SCANNING;

ARTICLE; LIGHT RELATED PHENOMENA; METHODOLOGY; MICROTECHNOLOGY; OPTICAL INSTRUMENTATION; SCANNING ELECTRON MICROSCOPY;

LENSES; MICROSCOPY, ELECTRON, SCANNING; MICROTECHNOLOGY; OPTICAL PHENOMENA;

EID: 77954889779     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.016133     Document Type: Article

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