Self-aligned VCSEL-microlens scanner with large scan range

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 656-659

  Quack, N ^a   Chou, J B ^a   Wu, M C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HORIZONTAL DISPLACEMENTS; MEMS SCANNER; MICROBEADS; MICROLASER; MICROLENS SCANNER; OPTICAL CHARACTERIZATION; SCAN RANGE; SCANNING ANGLES; SCANNING SYSTEMS; SELF-ALIGNED; VERTICAL-CAVITY SURFACE EMITTING LASER;

ALIGNMENT; MICROLENSES; MOEMS;

SCANNING;

EID: 84860425000     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170272     Document Type: Conference Paper

References (8)

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