Numerical and experimental study on silicon microresonators based on phononic crystal slabs with reduced central-hole radii

Journal of Micromechanics and Microengineering

Volumn 23, Issue 6, 2013, Pages

  Wang, Nan ^a,b   Hsiao, Fu Li ^a,c   Tsai, J M ^b   Palaniapan, Moorthi ^a   Kwong, Dim Lee ^b   Lee, Chengkuo ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION PROCESS; INTERDIGITAL TRANSDUCER; NUMERICAL AND EXPERIMENTAL STUDY; PHONONIC CRYSTALS (PNC); SILICON MICRORESONATORS; SILICON RESONATORS; SIMULATED TRANSMISSION SPECTRA; STEADY-STATE DISPLACEMENTS;

ACOUSTICS; ALUMINUM NITRIDE; BAND STRUCTURE; DEFECTS; MICROMECHANICAL RESONATORS; PHONONS; RESONATORS; SILICON;

NATURAL FREQUENCIES;

EID: 84878124387     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/6/065030     Document Type: Article

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