Ultra-thin free-standing single crystalline silicon membranes with strain control

Applied Physics Letters

Volumn 102, Issue 19, 2013, Pages

  Shchepetov, A ^a   Prunnila, M ^a   Alzina, F ^b   Schneider, L ^b   Cuffe, J ^b,e   Jiang, H ^c   Kauppinen, E I ^c   Sotomayor Torres, C M ^b,d   Ahopelto, J ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b CATALAN INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY ICN2   (Spain)

^c AALTO UNIVERSITY   (Finland)

^d INSTITUCIÓ CATALANA DE RECERCA I ESTUDIS AVANÇATS ICREA   (Spain)

^e MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION AND CHARACTERIZATIONS; SILICON MEMBRANES; SINGLE CRYSTALLINE SILICON; SINGLE-CRYSTALLINE; ULTRA-THIN;

MECHANICAL PROPERTIES;

MEMBRANES;

EID: 84877980614     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4807130     Document Type: Article

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