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Volumn 63, Issue 3, 2001, Pages 353091-3530911
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Strain effect in silicon-on-insulator materials: Investigation with optical phonons
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Author keywords
[No Author keywords available]
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Indexed keywords
SILICON;
SILICON DIOXIDE;
ARTICLE;
COMPRESSION;
EXPERIMENT;
INFRARED SPECTROMETRY;
MODEL;
OPTICS;
RAMAN SPECTROMETRY;
REFLECTOMETRY;
SEMICONDUCTOR;
STRESS STRAIN RELATIONSHIP;
SURFACE PROPERTY;
THEORY;
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EID: 0035130948
PISSN: 01631829
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (46)
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References (28)
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