Highly sensitive MOSFET gas sensors with porous platinum gate electrode

Electronics Letters

Volumn 33, Issue 6, 1997, Pages 535-536

  Seo, H ^a   Endoh, T ^a   Fukuda, H ^a   Nomura, S ^a  

^a MURORAN INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Gas sensors; MOSFET

Indexed keywords

GAS SENSING ELECTRODES; GATES (TRANSISTOR); HYDROGEN; MOSFET DEVICES; PLATINUM; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; VOLTAGE MEASUREMENT;

POROUS PLATINUM GATE ELECTRODES;

ELECTROCHEMICAL SENSORS;

EID: 0031101013     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19970327     Document Type: Article

References (6)

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