Density functional theory predictions of the composition of atomic layer deposition-grown ternary oxides

ACS Applied Materials and Interfaces

Volumn 5, Issue 9, 2013, Pages 3704-3715

  Murray, Ciaran ^a   Elliott, Simon D ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

atomic layer deposition; density functional theory; ligand; metal precursors; stoichiometry; ternary oxides

Indexed keywords

DENSITY FUNCTIONAL THEORY METHODS; HYDROLYZED COMPLEXES; HYDROXYLATED SURFACES; METAL PRECURSOR; OPTIMIZED STRUCTURES; QUANTUM-CHEMICAL ESTIMATION; TERNARY OXIDE SYSTEMS; TERNARY OXIDES;

BROMINE; COPPER; DENSITY FUNCTIONAL THEORY; DEPOSITION; HYDROLYSIS; LIGANDS; METAL COMPLEXES; METALS; METHANE; POSITIVE IONS; QUANTUM CHEMISTRY; SCANDIUM; STOICHIOMETRY; ZIRCONIUM;

ATOMIC LAYER DEPOSITION;

CATION; METAL; OXIDE; TERT BUTYL ALCOHOL;

ARTICLE; CHEMICAL MODEL; CHEMICAL STRUCTURE; CHEMISTRY; HYDROLYSIS; THERMODYNAMICS;

CATIONS; HYDROLYSIS; METALS; MODELS, CHEMICAL; MODELS, MOLECULAR; OXIDES; TERT-BUTYL ALCOHOL; THERMODYNAMICS;

EID: 84877355398     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am400310p     Document Type: Article

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