Printed sub-100 nm polymer-derived ceramic structures

ACS Applied Materials and Interfaces

Volumn 5, Issue 9, 2013, Pages 3894-3899

  Duong, Binh ^a   Gangopadhyay, Palash ^b   Brent, Josh ^b   Seraphin, Supapan ^c   Loutfy, Raouf O ^d   Peyghambarian, Nasser ^b   Thomas, Jayan ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b UNIVERSITY OF ARIZONA   (United States)

^c University of Arizona   (United States)

^d Mat Electrochemical Res (MER) C   (United States)

Author keywords

nanoimprinting; nanostructured ceramics; polymer derived ceramics; polyureasilazane; SNAP technique; sub 100 nm ceramic structures

Indexed keywords

CERAMIC STRUCTURE; NANO-IMPRINTING; NANOSTRUCTURED CERAMIC; POLYMER-DERIVED CERAMICS; POLYUREASILAZANE; SNAP TECHNIQUE;

NANOIMPRINT LITHOGRAPHY; POLYMERS;

CERAMIC MATERIALS;

EID: 84877353262     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am400587z     Document Type: Article

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