Characterization of thick and thin film SiCN for pressure sensing at high temperatures

Sensors

Volumn 10, Issue 2, 2010, Pages 1338-1354

  Leo, Alfin ^a   Andronenko, Sergey ^a,b   Stiharu, Ion ^a   Bhat, Rama B ^a  

^a Dept of Electrical and Computer Engineering   (Canada)

^b KAZAN STATE UNIVERSITY   (Russian Federation)

Author keywords

Dynamic pressure sensing at high temperatures; Polymer derived ceramic; SiCN

Indexed keywords

HIGH TEMPERATURE; HIGH-TEMPERATURE ENVIRONMENT; IMPROVING PERFORMANCE; OPERATING TEMPERATURE; POLYMER-DERIVED CERAMICS; SICN; THICK AND THIN FILMS; THICKNESS OF THE FILM;

CERAMIC MATERIALS; CONDITION MONITORING; FILM PREPARATION; KETONES; MECHANICAL PROPERTIES; PHOTOLITHOGRAPHY; POLYMERS; PRESSURE MEASUREMENT; PRESSURE SENSORS; THERMOSETS;

HIGH TEMPERATURE APPLICATIONS;

2,2 DIMETHOXY 2 PHENYLACETOPHENONE; 2,2-DIMETHOXY-2-PHENYLACETOPHENONE; ACETOPHENONE DERIVATIVE; POLYMER; SILICON DERIVATIVE;

ARTICLE; CERAMICS; CHEMISTRY; ELECTRONICS; HEAT; PRESSURE; ULTRAVIOLET RADIATION;

ACETOPHENONES; CERAMICS; ELECTRONICS; HOT TEMPERATURE; POLYMERS; PRESSURE; SILICON COMPOUNDS; ULTRAVIOLET RAYS;

EID: 77950283268     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s100201338     Document Type: Article

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