SiC ceramic micropatterns from polycarbosilanes

Journal of the European Ceramic Society

Volumn 30, Issue 13, 2010, Pages 2773-2779

  Jang, Yeon Suk ^a   Jank, Michael ^b   Maier, Verena ^a   Durst, Karsten ^a   Travitzky, Nahum ^a   Zollfrank, Cordt ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

Author keywords

Microstructure final; Optical properties; Precursors organic; SiC; Softlithography

Indexed keywords

AFTER-TREATMENT; CRYSTALLISATION; MICRO-OPTICAL APPLICATIONS; MICROPATTERNED; MICROPATTERNS; MICROSTRUCTURE-FINAL; N-OCTANES; NANOCRYSTALLINES; POLYCARBOSILANES; REPLICATION TECHNIQUES; SIC CERAMICS; SOFT-LITHOGRAPHY; THERMAL DEGRADATIONS; YOUNG'S MODULUS;

ANODIC OXIDATION; ARGON; CERAMIC MATERIALS; CRYSTALLITE SIZE; DIFFERENTIAL SCANNING CALORIMETRY; HYDROFLUORIC ACID; INFRARED SPECTROSCOPY; MICROSTRUCTURE; MOLDS; NANOINDENTATION; OPTICAL PROPERTIES; PHOTODEGRADATION; POLYSILANES; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SILICON OXIDES; SILICON WAFERS; SILICONES; THERMOGRAVIMETRIC ANALYSIS; WAVELET TRANSFORMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77954539365     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2010.05.019     Document Type: Article

References (33)

1. Colombo P., Paulson T.E., Pantano C.G. Synthesis of silicon carbide thin films with polycarbosilane (PCS). J Am Ceram Soc 1997, 80:2333-2340.
2. Riedel R., Mera G., Hauser R., Klonczynski A. Silicon-based polymer-derived ceramics: synthesis properties and application-a review. Jpn J Ceram Soc 2006, 114:425-444.
3. Yajima S., Hagegawa Y., Okamura K., Matsuzuwa T. Development of high tensile strength silicon carbide fibre using an organosilicon polymer precursor. Nature 1978, 273:525-527.
4. Yajima S., Hasegawa Y., Hayashi J., Iimura M. Synthesis of continuous silicon carbide fibre with high tensile strength and high Young's modulus. J Mater Sci Lett 1978, 13:2569-2576.
5. Hasegawa Y., Okamura K. Synthesis of continuous silicon carbide fibre. J Mater Sci 1983, 18:3633-3648.
6. Pivin J.C., Colombo P., Soraru G.D. Comparison of ion irradiation effects in silicon-based preceramic thin films. J Am Ceram Soc 2000, 83:713-720.
7. Yao R., Feng Z., Yu Y., Li S., Chen L., Zhang Y. Synthesis and characterization of continuous freestanding silicon carbide films with polycarbosilane (PCS). J Eur Ceram Soc 2009, 29:2079-2085.
8. Suda H., Yamauchi H., Uchimaru Y., Fujiwara I., Haraya K. Structural evolution during conversion of polycarbosilane precursor into silicon carbide-based microporous membranes. Jpn J Ceram Soc 2006, 114:539-544.
9. Nagano T., Sato K., Saitho T., Iwamoto Y. Gas permeation of amorphous SiC membranes synthesized from polycarbosilane without oxygen-curing process. Jpn J Ceram Soc 2006, 114:533-538.
10. Narisawa M., Kado H., Mori R., Mabuchi H., Kohyama A., Satoh M. Microstructure of silicon carbide nano powder-polycarbosilane-solvent mixed slurries and observed shear rate dependence in slurry viscosity. Mater Sci Eng B 2008, 148:187-191.
11. Hilbig A., Müller E., Wenzel R. The microstructure of polymer-derived amorphous silicon carbide layers. J Eur Ceram Soc 2005, 25:151-156.
12. Stern E., Heyder M., Scheffler F. Micropatterned ceramic surfaces by coating with filled preceramic polymers. J Am Ceram Soc 2009, 92:2438-2442.
13. Lee D.H., Park K.H., Hong L.Y., Kim D.P. SiCN ceramic patterns fabricated by soft lithography techniques. Sens Actuators A 2007, 135:895-901.
14. Yang H., Deschatelets P., Brittain S.T., Whitesides G.M. Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography. Adv Mater 2001, 13:54-58.
15. 3-based gas mixtures. J Electron Mater 2003, 32:1-37.
16. Greenberg S., Clendenning S.B., Liu K., Manners I., Aouba S., Ruda H.E. Synthesis and lithographic pattering of polycarbosilanes with pendant cobalt carbonyl clusters. Macromolecules 2005, 38:2023-2026.
17. Greil P. Polymer derived engineering ceramics. Adv Eng Mater 2000, 2:339-348.
18. Interrante L.V., Jacobs J.M., Sherwood W., Whitmarsh C.W. Fabrication and properties of fiber- and particulate-reinforced SiC matrix composites obtained with (A)HPCS as the matrix source. Key Eng Mater 1997, 127-131:271-278.
19. Pailler R., Hemida A.T., Naslain R. Continuous SiC-based model monofilaments with a low free carbon content. Part I: From the pyrolysis of a polycarbosilane precursor under an atmosphere of hydrogen. J Mater Sci 1997, 32:2359-2366.
20. Oliver W.C., Pharr G.M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J Mater Res 1992, 7:1564-1583.
21. Soraru G.D., Mackenzie J.D. Structural evolutions from polycarbosilane to SiC ceramic. J Mater Sci 1990, 25:3886-3893.
22. Cheng X., Xie Z., Xiao J., Song Y. Influence of temperature on the properties of polycarbosilane. J Inorg Organometall Polym Mater 2005, 15:253-259.
23. Ly H.Q., Taylor R., Day R.J. Conversion of polycarbosilane (PCS) to SiC-based ceramic. Part 1: Characterisation of PCS and curing products. J Mater Sci 2001, 36:4037-4043.
24. Li H., Zhang L., Cheng L., Wang Y., Yu Z., Huang M., et al. Polymer-ceramic conversion of highly branched liquid polycarbosilane for SiC-based ceramics. J Mater Sci 2008, 43:2806-2811.
25. Li Y.-L., Fan H., Su D., Fasel C., Riedel R. Synthesis, structures, and properties of bulk Si(O)C ceramics from polycarbosilane. J Am Ceram Soc 2009, 92:2175-2181.
26. Yajima S., Hagegawa Y., Hayashi J., Iimura M. Synthesis of continuous silicon carbide fiber with high tensile strength and high Young's modulus. J Mater Sci 1978, 13:2569-2576.
27. Yive N.S.C.K., Corriu R.J.P., Leclercq D., Mutin P.H., Vioux A. Silicon carbonitride from polymeric precursors: thermal cross-linking and pyrolysis of oligosilazane model compounds. Chem Mater 1992, 4:141-146.
28. Bouillon E., Langlais F., Paillr R., Naslain R. Conversion mechanisms of a polycarbosilane precursor into an SiC-based ceramic material. J Mater Sci 1991, 26:1333-1345.
29. Liu Q., Wu H.-J., Lewis R., Maciel G.E., Interrante L.V. Investigation of the pyrolytic conversion of poly(silylenemethylene) to silicon carbide. Chem Mater 1999, 11:2038-2048.
30. 1-x conversion studied by inelastic neutron scattering and infrared absorption. J Non-Cryst Sol 1992, 150:255-259.
31. Ly H.Q., Taylor R., Day R.J., Heatley F. Conversion of polycarbosilane (PCS) to SiC-based ceramic. Part II: Pyrolysis and characterisation. J Mater Sci 2001, 36:4045-4057.
32. Moraes K.V., Interrante L.V. Processing, fracture toughness, and Vickers hardness of allylhydridopolycarbosilane-derived silicon carbide. J Am Ceram Soc 2003, 86:342-346.
33. Jamet J., Spann J.R., Rice R.W., Lewis D., Coblenz W.S. Ceram Eng Sci Proc 1984, 5:677-694.