메뉴 건너뛰기




Volumn 113, Issue 16, 2013, Pages

Efficient parametric excitation of silicon-on-insulator microcantilever beams by fringing electrostatic fields

Author keywords

[No Author keywords available]

Indexed keywords

BEAM CHARACTERISTICS; CO-PLANAR ELECTRODES; DEEP REACTIVE ION ETCHING; GALERKIN DECOMPOSITION; LASER DOPPLER VIBROMETERS; MICROCANTILEVER BEAMS; MICROMECHANICAL CANTILEVERS; PARAMETRIC EXCITATIONS;

EID: 84877301721     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4802680     Document Type: Article
Times cited : (59)

References (49)
  • 3
    • 33750491936 scopus 로고    scopus 로고
    • 10.1103/PhysRevE.74.046619
    • E. Buks and B. Yurke, Phys. Rev. E 74, 046619 (2006). 10.1103/PhysRevE.74.046619
    • (2006) Phys. Rev. e , vol.74 , pp. 046619
    • Buks, E.1    Yurke, B.2
  • 11
    • 34247644886 scopus 로고    scopus 로고
    • 10.1016/j.mee.2007.01.232
    • M. Tanaka, Microelectron. Eng. 84, 1341 (2007). 10.1016/j.mee.2007.01.232
    • (2007) Microelectron. Eng. , vol.84 , pp. 1341
    • Tanaka, M.1
  • 12
  • 30
  • 39
    • 35649015720 scopus 로고    scopus 로고
    • 10.1088/0960-1317/17/11/004
    • K. B. Lee, J. Micromech. Microeng. 17, 2186 (2007). 10.1088/0960-1317/17/ 11/004
    • (2007) J. Micromech. Microeng. , vol.17 , pp. 2186
    • Lee, K.B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.