-
1
-
-
0042956960
-
-
(Wiley, Brookhaven, NJ)
-
G. M. Rebeiz, RF MEMS: Theory, Design, and Technology, (Wiley, Brookhaven, NJ, 2003).
-
(2003)
RF MEMS: Theory, Design, and Technology
-
-
Rebeiz, G.M.1
-
2
-
-
19944373083
-
-
10.1021/nl050456k
-
B. Ilic, Y. Yang, K. Aubin, R. Reichenbach, S. Krylov, and H. G. Craighead, Nano Lett. 5, 925 (2005). 10.1021/nl050456k
-
(2005)
Nano Lett.
, vol.5
, pp. 925
-
-
Ilic, B.1
Yang, Y.2
Aubin, K.3
Reichenbach, R.4
Krylov, S.5
Craighead, H.G.6
-
3
-
-
33750491936
-
-
10.1103/PhysRevE.74.046619
-
E. Buks and B. Yurke, Phys. Rev. E 74, 046619 (2006). 10.1103/PhysRevE.74.046619
-
(2006)
Phys. Rev. e
, vol.74
, pp. 046619
-
-
Buks, E.1
Yurke, B.2
-
4
-
-
77951843428
-
-
10.1063/1.3393999
-
D. R. Southworth, L. M. Bellan, Y. Linzon, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 96, 163503 (2010); 10.1063/1.3393999
-
(2010)
Appl. Phys. Lett.
, vol.96
, pp. 163503
-
-
Southworth, D.R.1
Bellan, L.M.2
Linzon, Y.3
Craighead, H.G.4
Parpia, J.M.5
-
5
-
-
79953746667
-
-
10.1063/1.3573770
-
D. R. Southworth, L. M. Bellan, Y. Linzon, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 98, 139901 (2011). 10.1063/1.3573770
-
(2011)
Appl. Phys. Lett.
, vol.98
, pp. 139901
-
-
Southworth, D.R.1
Bellan, L.M.2
Linzon, Y.3
Craighead, H.G.4
Parpia, J.M.5
-
6
-
-
84862154455
-
-
10.1063/1.4720473
-
D. J. Joe, Y. Linzon, V. P. Adiga, R. A. Barton, M. Kim, B. Ilic, S. Krylov, J. M. Parpia, and H. G. Craighead, J. Appl. Phys. 111, 104517 (2012). 10.1063/1.4720473
-
(2012)
J. Appl. Phys.
, vol.111
, pp. 104517
-
-
Joe, D.J.1
Linzon, Y.2
Adiga, V.P.3
Barton, R.A.4
Kim, M.5
Ilic, B.6
Krylov, S.7
Parpia, J.M.8
Craighead, H.G.9
-
7
-
-
84861856271
-
-
10.1103/PhysRevLett.108.236101
-
R. B. Karabalin, L. G. Villanueva, M. H. Matheny, J. E. Sader, and M. L. Roukes, Phys. Rev. Lett. 108, 236101 (2012). 10.1103/PhysRevLett.108.236101
-
(2012)
Phys. Rev. Lett.
, vol.108
, pp. 236101
-
-
Karabalin, R.B.1
Villanueva, L.G.2
Matheny, M.H.3
Sader, J.E.4
Roukes, M.L.5
-
8
-
-
17444392803
-
-
10.1063/1.1897445
-
X. M. H. Huang, M. Manolidis, S. C. Jun, and J. Hone, Appl. Phys. Lett. 86, 143104 (2005). 10.1063/1.1897445
-
(2005)
Appl. Phys. Lett.
, vol.86
, pp. 143104
-
-
Huang, X.M.H.1
Manolidis, M.2
Jun, S.C.3
Hone, J.4
-
9
-
-
77957922674
-
-
10.1021/nl101586s
-
M. Li, E. B. Myers, H. X. Tang, S. J. Aldridge, H. C. McCaig, J. J. Whiting, R. J. Simonson, N. S. Lewis, and M. L. Roukes, Nano Lett. 10, 3899 (2010). 10.1021/nl101586s
-
(2010)
Nano Lett.
, vol.10
, pp. 3899
-
-
Li, M.1
Myers, E.B.2
Tang, H.X.3
Aldridge, S.J.4
McCaig, H.C.5
Whiting, J.J.6
Simonson, R.J.7
Lewis, N.S.8
Roukes, M.L.9
-
11
-
-
34247644886
-
-
10.1016/j.mee.2007.01.232
-
M. Tanaka, Microelectron. Eng. 84, 1341 (2007). 10.1016/j.mee.2007.01.232
-
(2007)
Microelectron. Eng.
, vol.84
, pp. 1341
-
-
Tanaka, M.1
-
13
-
-
0032511981
-
-
10.1038/24122
-
K. L. Turner, S. A. Miller, P. G. Hartwell, N. C. MacDonald, S. H. Strogatz, and S. G. Adams, Nature 396, 149 (1998). 10.1038/24122
-
(1998)
Nature
, vol.396
, pp. 149
-
-
Turner, K.L.1
Miller, S.A.2
Hartwell, P.G.3
Macdonald, N.C.4
Strogatz, S.H.5
Adams, S.G.6
-
15
-
-
67349245844
-
-
10.1016/j.sna.2009.03.010
-
L. A. Oropeza-Ramos, C. B. Burgner, and K. L. Turner, Sens. Actuators, A 152, 80 (2009). 10.1016/j.sna.2009.03.010
-
(2009)
Sens. Actuators, A
, vol.152
, pp. 80
-
-
Oropeza-Ramos, L.A.1
Burgner, C.B.2
Turner, K.L.3
-
16
-
-
77957107490
-
-
10.1016/j.sna.2009.11.016
-
Z. Hu, B. J. Gallacher, K. M. Harish, and J. S. Burdess, Sens. Actuators, A 162, 145 (2010). 10.1016/j.sna.2009.11.016
-
(2010)
Sens. Actuators, A
, vol.162
, pp. 145
-
-
Hu, Z.1
Gallacher, B.J.2
Harish, K.M.3
Burdess, J.S.4
-
17
-
-
0038494577
-
-
M. Napoli, R. Baskaran, K. L. Turner, and B. Bamieh, in Proceedings of IEEE 16th International Annual Conference on MEMS (MEMS2003) (2003), p. 169.
-
(2003)
Proceedings of IEEE 16th International Annual Conference on MEMS (MEMS2003)
, pp. 169
-
-
Napoli, M.1
Baskaran, R.2
Turner, K.L.3
Bamieh, B.4
-
23
-
-
79953673088
-
-
10.1088/0960-1317/20/1/015041
-
S. Krylov, Y. Gerson, T. Nachmias, and U. Keren, J. Micromech. Microeng. 20, 015041 (2010). 10.1088/0960-1317/20/1/015041
-
(2010)
J. Micromech. Microeng.
, vol.20
, pp. 015041
-
-
Krylov, S.1
Gerson, Y.2
Nachmias, T.3
Keren, U.4
-
24
-
-
33847035252
-
-
10.1103/PhysRevLett.98.078103
-
R. Almog, S. Zaitsev, O. Shtempluck, and E. Buks, Phys. Rev. Lett. 98, 078103 (2007). 10.1103/PhysRevLett.98.078103
-
(2007)
Phys. Rev. Lett.
, vol.98
, pp. 078103
-
-
Almog, R.1
Zaitsev, S.2
Shtempluck, O.3
Buks, E.4
-
25
-
-
80054968904
-
-
S. Krylov, N. Molinazzy, T. Shmilovich, U. Pomerantz, and S. Lulinsky, in Proceedings of the ASME Design Engineering Technical Conference (2010), Vol. 4, p. 601.
-
(2010)
Proceedings of the ASME Design Engineering Technical Conference
, vol.4
, pp. 601
-
-
Krylov, S.1
Molinazzy, N.2
Shmilovich, T.3
Pomerantz, U.4
Lulinsky, S.5
-
27
-
-
33746007750
-
-
10.1016/j.jsv.2006.03.009
-
J. F. Rhoads, S. W. Shaw, K. L. Turner, J. Moehlis, B. E. DeMartini, and W. Zhang, J. Sound Vib. 296, 797 (2006). 10.1016/j.jsv.2006.03.009
-
(2006)
J. Sound Vib.
, vol.296
, pp. 797
-
-
Rhoads, J.F.1
Shaw, S.W.2
Turner, K.L.3
Moehlis, J.4
Demartini, B.E.5
Zhang, W.6
-
30
-
-
77954297088
-
-
10.1615/IntJMultCompEng.v6.i6.50
-
S. Krylov, Int. J. Multiscale Comp. Eng. 6, 563 (2008). 10.1615/IntJMultCompEng.v6.i6.50
-
(2008)
Int. J. Multiscale Comp. Eng.
, vol.6
, pp. 563
-
-
Krylov, S.1
-
32
-
-
78049352101
-
-
10.1088/0960-1317/20/10/105012
-
C. van der Avoort, R. van der Hout, J. J. M. Bontemps, P. G. Steeneken, K. Le Phan, R. H. B. Fey, J. Hulshof, and J. T. M. van Beek, J. Micromech. Microeng. 20, 105012 (2010). 10.1088/0960-1317/20/10/105012
-
(2010)
J. Micromech. Microeng.
, vol.20
, pp. 105012
-
-
Van Der Avoort, C.1
Van Der Hout, R.2
Bontemps, J.J.M.3
Steeneken, P.G.4
Le Phan, K.5
Fey, R.H.B.6
Hulshof, J.7
Van Beek, J.T.M.8
-
34
-
-
77955857738
-
-
10.1115/1.3155016
-
D. Schwartz, D. J. Kim, and R. T. MCloskey, J. Dyn. Syst., Meas., Control 131, 061004 (2009). 10.1115/1.3155016
-
(2009)
J. Dyn. Syst., Meas., Control
, vol.131
, pp. 061004
-
-
Schwartz, D.1
Kim, D.J.2
McLoskey, R.T.3
-
37
-
-
0032099254
-
-
10.1109/84.679344
-
S. G. Adams, F. M. Bertsch, K. A. Shaw, and N. C. MacDonald, J. Microelectromech. Syst. 7, 172 (1998). 10.1109/84.679344
-
(1998)
J. Microelectromech. Syst.
, vol.7
, pp. 172
-
-
Adams, S.G.1
Bertsch, F.M.2
Shaw, K.A.3
Macdonald, N.C.4
-
38
-
-
1942540397
-
-
10.1109/JSTQE.2004.829200
-
D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, and M. C. Wu, IEEE J. Sel. Top. Quantum Electron. 10, 505 (2004). 10.1109/JSTQE.2004.829200
-
(2004)
IEEE J. Sel. Top. Quantum Electron.
, vol.10
, pp. 505
-
-
Hah, D.1
Patterson, P.R.2
Nguyen, H.D.3
Toshiyoshi, H.4
Wu, M.C.5
-
39
-
-
35649015720
-
-
10.1088/0960-1317/17/11/004
-
K. B. Lee, J. Micromech. Microeng. 17, 2186 (2007). 10.1088/0960-1317/17/ 11/004
-
(2007)
J. Micromech. Microeng.
, vol.17
, pp. 2186
-
-
Lee, K.B.1
-
42
-
-
71949102024
-
-
10.1088/0960-1317/20/1/015004
-
J. Su, H. Yang, P. Fay, W. Porod, and G. H. Bernstein, J. Micromech. Microeng. 20, 015004 (2010). 10.1088/0960-1317/20/1/015004
-
(2010)
J. Micromech. Microeng.
, vol.20
, pp. 015004
-
-
Su, J.1
Yang, H.2
Fay, P.3
Porod, W.4
Bernstein, G.H.5
-
43
-
-
84866038995
-
-
10.1063/1.4751351
-
J. Rieger, T. Faust, M. J. Seitner, J. P. Kotthaus, and E. M. Weiga, Appl. Phys. Lett. 101, 103110 (2012). 10.1063/1.4751351
-
(2012)
Appl. Phys. Lett.
, vol.101
, pp. 103110
-
-
Rieger, J.1
Faust, T.2
Seitner, M.J.3
Kotthaus, J.P.4
Weiga, E.M.5
-
44
-
-
84870366402
-
-
10.1088/0960-1317/22/12/125029
-
J. Small, A. Fruehling, A. Garg, X. Liu, and D. Peroulis, J. Micromech. Microeng. 22, 125029 (2012). 10.1088/0960-1317/22/12/125029
-
(2012)
J. Micromech. Microeng.
, vol.22
, pp. 125029
-
-
Small, J.1
Fruehling, A.2
Garg, A.3
Liu, X.4
Peroulis, D.5
-
45
-
-
84866309979
-
-
10.1088/0960-1317/22/9/095004
-
J. Small, W. Irshad, A. Fruehling, A. Garg, X. Liu, and D. Peroulis, J. Micromech. Microeng. 22, 095004 (2012). 10.1088/0960-1317/22/9/095004
-
(2012)
J. Micromech. Microeng.
, vol.22
, pp. 095004
-
-
Small, J.1
Irshad, W.2
Fruehling, A.3
Garg, A.4
Liu, X.5
Peroulis, D.6
-
46
-
-
27544457811
-
-
V. Agache, B. Legrand, K. Nakamura, H. Kawakatsu, L. Buchaillot, H. Toshiyoshi, D. Collard, and H. Fujita, in Proceedings of IEEE 13th International Conference on Solid-State Sensors, Actuators and Microsystems (2005), p. 2023.
-
(2005)
Proceedings of IEEE 13th International Conference on Solid-State Sensors, Actuators and Microsystems
, pp. 2023
-
-
Agache, V.1
Legrand, B.2
Nakamura, K.3
Kawakatsu, H.4
Buchaillot, L.5
Toshiyoshi, H.6
Collard, D.7
Fujita, H.8
|