Efficient parametric amplification in high and very high frequency piezoelectric nanoelectromechanical systems

Applied Physics Letters

Volumn 97, Issue 18, 2010, Pages

  Karabalin, R B ^a   Masmanidis, S C ^a   Roukes, M L ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT PRESSURES; MECHANICAL PARAMETERS; NANO ELECTROMECHANICAL SYSTEMS; NANOMECHANICAL STRUCTURE; PARAMETRIC AMPLIFICATION; PARAMETRIC INSTABILITIES; PARAMETRIC PUMPING; QUALITY FACTORS; RESONANCE AMPLITUDES; VERY HIGH FREQUENCY;

ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; STRESSES;

AMPLIFICATION;

EID: 78649284151     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3505500     Document Type: Article

References (23)

1. M. L. Roukes, Phys. World 0953-8585 14, 25 (2001).
2. X. M. H. Huang, C. Zorman, M. Mehregany, and M. L. Roukes, Nature (London) 0028-0836 421, 496 (2003). 10.1038/421496a
3. N. Liu, F. Giesen, M. Belov, J. Losby, J. Moroz, A. E. Fraser, G. Mckinnon, T. J. Clement, V. Sauer, W. K. Hiebert, and M. R. Freeman, Nat. Nanotechnol. 1748-3387 3, 715 (2008). 10.1038/nnano.2008.319
4. Y. T. Yang, C. Calegari, X. L. Feng, K. L. Ekinci, and M. L. Roukes, Nano Lett. 1530-6984 6, 583 (2006). 10.1021/nl052134m
5. K. Jensen, K. Kim, and A. Zettl, Nat. Nanotechnol. 1748-3387 3, 533 (2008). 10.1038/nnano.2008.200
6. D. Rugar, R. Budakian, H. J. Mamin, and B. W. Chui, Nature (London) 0028-0836 430, 329 (2004). 10.1038/nature02658
7. M. D. LaHaye, O. Buu, B. Camarota, and K. C. Schwab, Science 0036-8075 304, 74 (2004). 10.1126/science.1094419
8. L. Wu, H. J. Kimble, J. L. Hall, and H. Wu, Phys. Rev. Lett. 0031-9007 57, 20 (1986).
9. E. Esarey, P. Sprangle, J. Krall, and A. Ting, IEEE Trans. Plasma Sci. 0093-3813 24, 252 (1996). 10.1109/27.509991
10. D. Rugar and P. Grütter, Phys. Rev. Lett. 0031-9007 67, 699 (1991). 10.1103/PhysRevLett.67.699
11. K. L. Turner, S. A. Miller, P. G. Hartwell, N. C. MacDonald, S. H. Strogatz, and S. G. Adams, Nature (London) 0028-0836 396, 149 (1998). 10.1038/24122
12. D. W. Carr, S. Evoy, L. Sekaric, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 0003-6951 77, 1545 (2000). 10.1063/1.1308270
13. R. Lifshitz and M. Cross, Phys. Rev. B 0556-2805 67, 134302 (2003). 10.1103/PhysRevB.67.134302
14. A. Dâna, F. Ho, and Y. Yamamoto, Appl. Phys. Lett. 0003-6951 72, 1152 (1998). 10.1063/1.120998
15. R. B. Karabalin, X. L. Feng, and M. L. Roukes, Nano Lett. 1530-6984 9, 3116 (2009). 10.1021/nl901057c
16. M. Moreno-Moreno, A. Raman, J. Gomez-Herrero, and R. Reifenberger, Appl. Phys. Lett. 0003-6951 88, 193108 (2006). 10.1063/1.2202132
17. I. Mahboob and H. Yamaguchi, Appl. Phys. Lett. 0003-6951 92, 253109 (2008). 10.1063/1.2949319
18. S. Timoshenko, D. H. Young, and W. Weaver, Jr., Vibration Problems in Engineering (Wiley, New York, 1974).
19. A. H. Nayfeh and D. T. Mook, Nonlinear Oscillations (Wiley, New York, 1979).
20. R. Lifshitz and M. C. Cross, Reviews of Nonlinear Dynamics and Complexity, edited by, H. G. Shuster, (Wiley, New York, 2008), Vol. 1, p. 52.
21. S. C. Masmanidis, R. B. Karabalin, I. De Vlaminck, G. Borghs, M. R. Freeman, and M. L. Roukes, Science 0036-8075 317, 780 (2007). 10.1126/science.1144793
22. R. B. Karabalin, M. H. Matheny, X. L. Feng, E. Defa, G. L. Rhun, C. Marcoux, S. Hentz, P. Andreucci, and M. L. Roukes, Appl. Phys. Lett. 0003-6951 95, 103111 (2009). 10.1063/1.3216586
23. W. Zhang and K. L. Turner, Sens. Actuators, A 0924-4247 122, 301 (2005). 10.1016/j.sna.2005.03.076