Design, modeling, and demonstration of a MEMS repulsive-force out-of-plane electrostatic micro actuator

Journal of Microelectromechanical Systems

Volumn 17, Issue 3, 2008, Pages 532-547

  He, Siyuan ^a   Mrad, Ridha Ben ^b  

^a RYERSON UNIVERSITY   (Canada)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

Actuators; Electrostatic devices; Mirrors

Indexed keywords

ACTUATORS; AEROSPACE APPLICATIONS; ARCHITECTURAL DESIGN; COMPOSITE MICROMECHANICS; COMPUTER NETWORKS; COMPUTER SIMULATION; CONFORMAL MAPPING; CURVE FITTING; ELECTROCHEMICAL SENSORS; ELECTROSTATICS; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NANOSTRUCTURED MATERIALS; ROTATION; TECHNOLOGY;

ANALYTICAL MODELLING; DESIGN AND OPTIMIZATION; DRIVING VOLTAGES; EXPERIMENTAL MEASUREMENTS; IN ORDER; LARGE SIZES; MAPPING TECHNIQUES; MECHANICAL ROTATION; MICRO ACTUATORS; MICRO MIRRORS; MULTI USERS; NUMERICAL SIMULATIONS; OPEN LOOPS; OUT OF PLANE; OUT-OF-PLANE ROTATION; PERFORMANCE CHARACTERISTICS; REPULSIVE FORCES; SETTLING TIME; SIMPLE PHYSICAL MODEL; SURFACE MICROMACHINING TECHNOLOGY; TWO LAYERS;

ELECTROSTATIC ACTUATORS;

EID: 45449120630     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.921710     Document Type: Article

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