Robust micro-rate sensor actuated by parametric resonance

Sensors and Actuators, A: Physical

Volumn 152, Issue 1, 2009, Pages 80-87

  Oropeza Ramos, Laura A ^a   Burgner, Christopher B ^a   Turner, Kimberly L ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Micro gyroscope; Micro rate sensor; Parametric resonance

Indexed keywords

ACTUATION MECHANISMS; DYNAMICAL PROPERTIES; FUNDAMENTAL FREQUENCIES; HARMONIC OSCILLATORS; INERTIAL SENSORS; MICRO-GYROSCOPE; MICRO-RATE SENSOR; MICROMACHINED; MODE SIGNALS; OFF-AXIS; PARAMETER VARIATIONS; PARAMETRIC RESONANCE; RICH DYNAMICS; SINGLE MASKS;

DYNAMIC RESPONSE; GYROSCOPES; RESONANCE; SENSORS;

PARAMETRIC OSCILLATORS;

EID: 67349245844     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.03.010     Document Type: Article

References (26)

1. N. Yazdi, F. Ayazi, K. Najafi, Micromachined inertial sensors, Proceedingsof the IEEE 86 (8) (August 1998).
2. W. Clark, Micromachined Vibratory Rate Gyroscopes, PhD thesis, University of California, Berkeley, (1997).
3. C. Acar, A. Shkel, Nonresonant micromachined gyroscopes with structural mode-decoupling, IEEE Sensors Journal 3 (4) (August 2003).
4. Acar C., and Shkel A. Inherently robust micromachined gyroscopes with 2-DOF sense-mode oscillator. Journal of Microelectromechanical Systems 15 April 2 (2006) 380-387
5. S. Alper, T. Akin, A single-crystal silicon symmetrical and decoupled mems gyroscope on an insulating substrate, JMEMS 14 (4) (August 2005).
6. Park S., and Horowitz R. Adaptive control for the conventional mode of operation of mems gyroscopes. Journal of Microelectromechanical Systems 12 (2003) 101-108
7. Leland R. Adaptive mode tuning for vibrational gyroscopes. IEEE Transactions on Control Systems Technology 11 (2003) 242-247
8. Painter C., and Shkel A. Active structural error suppression in mems vibratory rate integrating gyroscopes. Sensors Journal, IEEE 3 (2003) 595-606
9. Shkel A., Horowitz R., Seshia A., Park S., and Howe R. Dynamics and control of micromachined gyroscopes. Proceedings of the American Control Conference 3 (1999) 2119-2124
10. Turner K.L., Miller S.A., Hartwell P., MacDonald N., Strogatz S., and Adams S. Five parametric resonances in a microelectromechanical system. Nature (1998) 149-152
11. R. Baskaran, Parametric Resonance and Amplification in Single and Coupled Micro Electro Mechanical Systems, PhD thesis, University of California, Santa Barbara, September 2003.
12. W. Zhang, Nonlinear Dynamics of Micro-Electro-Mechanical Oscillators and their Application in Mass Sensing, PhD thesis, University of California, Santa Barbara, August 2004.
13. B. DeMartini, J.F. Rhoads, K.L. Turner, S.W. Shaw, J. Moehlis, Linear and nonlinear tuning of parametrically excited mems oscillators, Journal of Microelectromechanical Systems 16 (2) (April 2007).
14. J.F. Rhoads, S.W. Shaw, K.L. Turner, R. Baskaran, Tunable micromechanical filters that exploit parametric resonance, Journal of Vibration and Acoustics 127 (5) (October 2005).
15. Adams S., Bertsch F., Shaw K., and MacDonald N. Independent tuning of linear and nonlinear stiffness coefficients. Journal of Microelectromechanical Systems 7 (1998) 172-180
16. L. Oropeza-Ramos, K. Turner, Parametric amplification in a memgyroscope, IEEE Sensors Irvine, CA, (2005).
17. Nayfeh A., and Mook D. Nonlinear Oscillations (1979), Wiley and Sons
18. R. Rand, Lecture Notes on Nonlinear Vibrations, ver. 34a, 2000.
19. Cartmell M. Introduction to Linear, Parametric, and Nonlinear Vibrations (1990), Chapman and Hall
20. K. Turner, Applications and Analysis of Parametric Resonance in Microelectromechanical Systems, PhD thesis, Cornell University, May 1999.
21. Zhang W., Baskaran R., and Turner K. Effect of cubic nonlinearity on auto-parametrically amplified resonant mems mass sensor. Sensors and Actuators A (Physical) 102 1-2 (2002) 139-150
22. L. Oropeza-Ramos, C.B. Burgner, C. Olroyd, K. Turner, Characterization of a novel memgyroscope actuated by parametric resonance, ASME International Design Engineering Technical Conferences, (September 2007).
23. Turner K.L., Hartwell P., and MacDonald N. Multi-dimensional mems motion characterization using laser vibrometry. Transducers (1999) 1144-1147
24. http://www.irvine-sensors.com.
25. http://www.ideal-aerosmith.com.
26. Oropeza-Ramos L., Burgner C.B., and Turner K.L. Inherently robust micro gyroscope actuated by parametric resonance. Proceedings of International Conference on Micro Electro Mechanical Systems. Tucson, AZ, January (2008)