Comprehensive synchrotron grazing-incidence X-ray scattering analysis of nanostructures in porous polymethylsilsesquioxane dielectric thin films

Journal of Applied Crystallography

Volumn 46, Issue 2, 2013, Pages 466-475

  Rho, Yecheol ^a   Ahn, Byungcheol ^a   Yoon, Jinhwan ^b   Ree, Moonhor ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Dong A University   (South Korea)

Author keywords

cross scattering terms; GIXS formulae; grazing incidence X ray scattering (GIXS); independent scattering terms; nanomaterials; nanoporous dielectric thin films; reflection effects; refraction effects

Indexed keywords

CROSS-SCATTERING TERMS; GIXS FORMULAE; GRAZING-INCIDENCE X-RAY SCATTERING; INDEPENDENT SCATTERING; NANOPOROUS DIELECTRICS; REFLECTION EFFECTS; REFRACTION EFFECTS;

COMPUTERIZED TOMOGRAPHY; NANOPORES; NANOSTRUCTURED MATERIALS; REFRACTIVE INDEX; X RAYS;

SCATTERING;

EID: 84875175725     PISSN: 00218898     EISSN: 16005767     Source Type: Journal    
DOI: 10.1107/S0021889812050923     Document Type: Article

References (60)

1. Ahn, B., Hirai, T., Jin, S., Rho, Y., Kim, K.-W., Kakimoto, M.-A., Gopalan, P., Hayakawa, T. & Ree, M. (2010). Macromolecules, 43, 10568-10582.
2. Bolze, J., Kim, J., Huang, J., Rah, S., Youn, H. S., Lee, B., Shin, T. J. & Ree, M. (2002). Macromol. Res. 10, 2-12.
3. Bolze, J., Ree, M., Youn, H. S., Chu, S. & Char, K. (2001). Langmuir, 17, 6683-6691.
4. Busch, P., Rauscher, M., Smilgies, D.-M., Posselt, D. & Papadakis, C. M. (2006). J. Appl. Cryst. 39, 433-442.
5. Chung, D. S., Park, J. W., Kim, S., Heo, K., Park, C. E., Ree, M., Kim, Y. & Kwon, S. (2009). Chem. Mater. 21, 5499-5507.
6. Du, P., Li, M., Douki, K., Li, X., Garcia, C., Jain, A., Smilgies, D., Fetters, L., Gruner, S., Wiesner, U. & Ober, C. (2004). Adv. Mater. 16, 953-957.
7. Gracin, D., Dubcek, P., Zorc, H. & Juraic, K. (2004). Thin Solid Films, 459, 216-219.
8. Heo, K., Jin, K. S., Oh, W., Yoon, J., Jin, S. & Ree, M. (2006). J. Phys. Chem. B, 110, 15887-15895.
9. Holy, V., Pietsch, U. & Baumbach, T. (1999). High-Resolution X-ray Scattering from Thin Films and Multilayers. New York: Springer.
10. Jedrecy, N., Renaud, G., Lazzri, R. & Jupille, J. (2005). Phys. Rev. B, 72, 045430.
11. Jiang, Z., Lee, D. R., Narayanan, S., Wang, J. & Sinha, S. K. (2011). Phys. Rev. B, 84, 075440.
12. Jin, S., Hirai, T., Ahn, B., Rho, Y., Kim, K. W., Kakimoto, M. A., Gopalan, P., Hayakawa, T. & Ree, M. (2010). J. Phys. Chem. B, 114, 8033-8042.
13. Jung, J., Kim, J. C., Rho, Y., Kim, M., Kim, H. & Ree, M. (2011). Am. Chem. Soc. Appl. Mater. Interf. 3, 2655-2664.
14. Jung, J., Park, H., Lee, J., Huang, H., Chang, T., Rho, Y., Ree, M., Sugimori, H. & Jinnai, H. (2011). Soft Matter, 7, 10424.
15. Kim, G., Yoon, J., Kim, J. S., Kim, H. & Ree, M. (2008). J. Phys. Chem. B, 112, 8868-8870.
16. Kim, J. C., Jung, J., Rho, Y., Kim, M., Kwon, W., Kim, H., Kim, I. J., Kim, J. R. & Ree, M. (2011). Biomacromolecules, 12, 2822-2833.
17. Kinning, D. J. & Thomas, E. L. (1984). Macromolecules, 17, 1712-1718.
18. Lazzari, R. (2002). J. Appl. Cryst. 35, 406-421.
19. Lee, B., Oh, W., Hwang, Y., Park, Y., Yoon, J., Jin, K. S., Heo, K., Kim, J., Kim, K. & Ree, M. (2005). Adv. Mater. 17, 696-701.
20. Lee, B., Oh, W., Yoon, J., Hwang, Y., Kim, J., Landes, B. G., Quintana, J. P. & Ree, M. (2005). Macromolecules, 38, 8991-8995.
21. Lee, B., Park, Y. H., Hwang, Y. T., Oh, W., Yoon, J. & Ree, M. (2005). Nat. Mater. 4, 147-151.
22. Lee, B., Park, I., Yoon, J., Park, S., Kim, J., Kim, K., Chang, T. & Ree, M. (2005). Macromolecules, 38, 4311-4323.
23. Lee, B., Yoon, J., Oh, W., Hwang, Y., Heo, K., Jin, K. S., Kim, J., Kim, K. & Ree, M. (2005). Macromolecules, 38, 3395-3405.
24. Leroy, F., Eymery, J., Buttard, D., Renaud, G., Lazzari, R. & Fournel, F. (2003). Appl. Phys. Lett. 82, 2598-2600.
25. Levine, J. R., Cohen, J. B., Chung, Y.W. & Georgopoulos, P. (1989). J. Appl. Cryst. 22, 528-532.
26. Moriarty, P. (2001). Rep. Prog. Phys. 64, 297-381.
27. Mueller-Buschbaum, P. (2003). Anal. Bioanal. Chem. 376, 3-10.
28. Oh, W. & Ree, M. (2004). Langmuir, 20, 6932-6939.
29. Oh, W., Shin, T. J., Ree, M., Jin, M. Y. & Char, K. (2002). Macromol. Chem. Phys. 203, 791-801.
30. Ohshimizu, K., Takahashi, A., Rho, Y., Higashihara, T., Ree, M. & Ueda, M. (2011). Macromolecules, 44, 719-727.
31. Okuda, H., Kato, M., Ochiai, S. & Kitajima, Y. (2009). Appl. Phys. Express, 2, 126501.
32. Okuda, H., Takeshita, K., Ochiai, S., Sakurai, S. & Kitajima, Y. (2011). J. Appl. Cryst. 44, 380-384.
33. Omote, K., Ito, Y. & Kawamura, S. (2003). Appl. Phys. Lett. 82, 544-546.
34. Park, H., Im, K., Chung, B., Ree, M., Chang, T., Sawa, K. & Jinnai, H. (2007). Macromolecules, 40, 2603-2605.
35. Park, I., Lee, B., Ryu, J., Im, K., Yoon, J., Ree, M. & Chang, T. (2005). Macromolecules, 38, 10532-10536.
36. Parratt, L. (1954). Phys. Rev. 95, 359-369.
37. Pedersen, J. S. (1994). J. Appl. Cryst. 27, 595-608.
38. Rao, C. N. R., Muller, A. & Cheetham, A. K. (2006). The Chemistry of Nanomaterials: Synthesis, Properties and Applications. Weinheim: John Wiley and Sons.
39. Rauscher, M., Paniago, R., Metzger, H., Kovats, Z., Domke, J., Pfannes, H. D., Schulze, J. & Eisele, I. (1999). J. Appl. Phys. 86, 6763-6769.
40. Rauscher, M., Salditt, T. & Spohn, H. (1995). Phys. Rev. B, 52, 16855-16863.
41. Renaud, G., Lazzari, R. & Leroy, F. (2009). Surf. Sci. Rep. 64, 255-380.
42. Renaud, G., Lazzari, R., Revenant, C., Barbier, A., Noblet, M., Ulrich, O., Leroy, F., Jupille, J., Borensztein, Y., Henry, C. R., Deville, J. P., Scheurer, F., Mane-Mane, J. & Fruchart, O. (2003). Science, 300, 1416-1419.
43. Revenant, C., Leroy, F., Lazzari, R., Renaud, G. & Henry, C. (2004). Phys. Rev. B, 69, 035411.
44. Roduner, E. (2006). Chem. Soc. Rev. 35, 583-592.
45. Sinha, S. K., Sirota, E. B., Garoff, S. & Stanley, H. B. (1988). Phys. Rev. B, 38, 2297-2311.
46. Stein, G. E., Kramer, E. J., Li, X. & Wang, J. (2007). Macromolecules, 40, 2453-2460.
47. Takahashi, A., Rho, Y., Higashihara, T., Ahn, B., Ree, M. & Ueda, M. (2010). Macromolecules, 43, 4843-4852.
48. Tate, M. P., Urade, V. N., Kowalski, J. D., Wei, T. C., Hamilton, B. D., Eggiman, B. W. & Hillhouse, H. W. (2006). J. Phys. Chem. B, 110, 9882-9892.
49. Tolan, M. (1999). X-ray Scattering from Soft-Matter Thin Films. New York: Springer.
50. Vignaud, G., Gibaud, A., Wang, J., Sinha, S. K., Daillant, J., Grübel, G. & Gallot, Y. (1997). J. Phys. Condens. Matter, 9, L125-L130.
51. Wakita, J., Jin, S., Shin, T. J., Ree, M. & Ando, S. (2010). Macromolecules, 43, 1930-1941.
52. Wang, Z. L. (2000). Characterization of Nanophase Materials. Weinheim: Wiley-VCH Verlag GmbH.
53. Weyerich, B., Brunner-Popela, J. & Glatter, O. (1999). J. Appl. Cryst. 32, 197-209.
54. Winans, R. E., Vajda, S., Lee, B., Riley, S. J., Seifert, S., Tikhonov, G. Y. & Tomczyk, N. A. (2004). J. Phys. Chem. B, 108, 18105-18107.
55. Xu, T., Goldbach, J. T., Misner, M. J., Kim, S., Gibaud, A., Gang, O., Ocko, B., Guarini, K. W., Black, C. T., Hawker, C. J. & Russell, T. P. (2004). Macromolecules, 37, 2972-2977.
56. Yang, S. Y., Park, J., Yoon, J., Ree, M., Jang, S. K. & Kim, J. K. (2008). Adv. Funct. Mater. 18, 1371-1377.
57. Yoon, J., Jin, K. S., Kim, H. C., Kim, G., Heo, K., Jin, S., Kim, J., Kim, K.-W. & Ree, M. (2007). J. Appl. Cryst. 40, 476-488.
58. Yoon, J., Kim, K., Kim, J., Heo, K., Jin, K. S., Jin, S., Shin, T. J., Lee, B., Rho, Y., Ahn, B. & Ree, M. (2008). Macromol. Res. 16, 575-585.
59. Yoon, J., Lee, S. W., Choi, S., Heo, K., Jin, K. S., Jin, S., Kim, G., Kim, J., Kim, K. W., Kim, H. & Ree, M. (2008). J. Phys. Chem. B, 112, 5338-5349.
60. Yoon, J., Ree, M., Hwang, Y., Lee, S.W., Lee, B., Kim, J. S., Kim, H. & Magonov, S. N. (2004). Langmuir, 20, 544-549.