Near-surface relaxation structure of annealed block copolymer film on Si substrates examined by grazing-incidence small-angle scattering utilizing soft X-rays

Journal of Applied Crystallography

Volumn 44, Issue 2, 2011, Pages 380-384

  Okuda, Hiroshi ^a   Takeshita, Kohki ^a   Ochiai, Shojiro ^a   Sakurai, Shin Ichi ^b   Kitajima, Yoshinori ^c  

^a KYOTO UNIVERSITY   (Japan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

^c HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION KEK   (Japan)

Author keywords

copolymer films; grazing incidence small angle X ray scattering; microphase separation; soft X rays

Indexed keywords

ANGLE OF INCIDENCE; BLOCK COPOLYMER FILMS; BRAGG SPOTS; COPOLYMER FILMS; CRITICAL ANGLES; EFFECTIVE SIZE; GI-SAXS; GRAZING INCIDENCE; GRAZING INCIDENCE SMALL-ANGLE X-RAY SCATTERING; LATTICE DISTORTIONS; PENETRATION DEPTH; SAMPLE SURFACE; SI (001) SUBSTRATE; SI SUBSTRATES; SMALL-ANGLE SCATTERING; SOFT X-RAY; SOFT X-RAYS;

BLOCK COPOLYMERS; COPOLYMERIZATION; SCATTERING; SILICON; SURFACE STRUCTURE; X RAY SCATTERING; X RAYS;

MICROPHASE SEPARATION;

EID: 79953049642     PISSN: 00218898     EISSN: 16005767     Source Type: Journal    
DOI: 10.1107/S0021889811003578     Document Type: Article

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