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Volumn 105, Issue , 2013, Pages 86-90
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High-efficiency InGaN-based LEDs grown on patterned sapphire substrates using nanoimprinting technology
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Author keywords
Light extraction efficiency; Light emitting diodes; Roller imprint lithography
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Indexed keywords
CHIP PROCESSING;
HIGH-EFFICIENCY;
IMPRINT LITHOGRAPHY;
IMPRINTED MATERIALS;
INDUCTIVE COUPLED PLASMA;
INGAN-BASED LED;
LIGHT OUTPUT;
LIGHT-EXTRACTION EFFICIENCY;
NANOIMPRINTING TECHNOLOGY;
OPTICAL EFFICIENCY;
OUTPUT POWER;
PATTERNED SAPPHIRE SUBSTRATE;
PDMS MOLDS;
POLYDIMETHYLSILOXANE PDMS;
ROLLER IMPRINTING;
SAPPHIRE SUBSTRATES;
SOFT POLYMERS;
EFFICIENCY;
ELECTRIC PROPERTIES;
EPITAXIAL GROWTH;
MICROCHANNELS;
MOLDS;
NANOIMPRINT LITHOGRAPHY;
ROLLERS (MACHINE COMPONENTS);
SAPPHIRE;
SILICONES;
SUBSTRATES;
LIGHT EMITTING DIODES;
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EID: 84874048241
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2013.01.027 Document Type: Article |
Times cited : (16)
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References (18)
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