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International Journal of Electrochemical Science

Volumn 8, Issue 1, 2013, Pages 1041-1046

An in-situ study of copper electropolishing in phosphoric acid solution

(8) Li, Deyu a Li, Ning a Xia, Guofeng a Zheng, Zhen a Wang, Jialin a Xiao, Ning a Zhai, Wenjie a Wu, Gang b

a HARBIN INSTITUTE OF TECHNOLOGY (China)

b LOS ALAMOS NATIONAL LABORATORY (United States)

Author keywords

Copper; ECMP; Electrochemical analysis; Electrolytic polishing; Planarization; Surface chemistry

Indexed keywords

EID: 84873857768 PISSN: None EISSN: 14523981 Source Type: Journal
DOI: None Document Type: Article

Times cited : (17)

References (19)

1
- 75949099050
- J.-Y. Lin, A.C. West, Electrochim. Acta, 55 (2010) 2325-2331.
- (2010) Electrochim. Acta , vol.55 , pp. 2325-2331
- Lin, J.-Y.¹ West, A.C.²

2
- 50649119266
- K.G. Shattuck, J. Lin, P. Cojocaru, A. West, Electrochim. Acta, 53 (2008) 8211-8216.
- (2008) Electrochim. Acta , vol.53 , pp. 8211-8216
- Shattuck, K.G.¹ Lin, J.² Cojocaru, P.³ West, A.⁴

3
- 84865080635
- N.M. Elmalah, S.M.A. Elhaliem, A.M. Ahmed, S.M. Ghozy, Int J Electrochem Sc, 7 (2012) 7720-7739.
- (2012) Int J Electrochem Sc , vol.7 , pp. 7720-7739
- Elmalah, N.M.¹ Elhaliem, S.M.A.² Ahmed, A.M.³ Ghozy, S.M.⁴

4
- 84872835098
- D. Li, N. Li, G. Xia, N. Xiao, Z. Zheng, W. Zhai, G. Wu, Int. J. Electrochem. Sci, 7 (2012) 9271-9277.
- (2012) Int. J. Electrochem. Sci , vol.7 , pp. 9271-9277
- Li, D.¹ Li, N.² Xia, G.³ Xiao, N.⁴ Zheng, Z.⁵ Zhai, W.⁶ Wu, G.⁷

5
- 0023089233
- D. Landolt, Electrochim. Acta, 32 (1987) 1-11.
- (1987) Electrochim. Acta , vol.32 , pp. 1-11
- Landolt, D.¹

6
- 0015655196
- K. Kojima, C.W. Tobias, J. Electrochem. Soc., 120 (1973) 1026.
- (1973) J. Electrochem. Soc. , vol.120 , pp. 1026
- Kojima, K.¹ Tobias, C.W.²

7
- 0029358169
- R. Vidal, A.C. West, J. Electrochem. Soc., 142 (1995) 2689-2694.
- (1995) J. Electrochem. Soc. , vol.142 , pp. 2689-2694
- Vidal, R.¹ West, A.C.²

8
- 25144436315
- I.I. Suni, B. Du, Ieee T Semiconduct M, 18 (2005) 341-349.
- (2005) Ieee T Semiconduct M , vol.18 , pp. 341-349
- Suni, I.I.¹ Du, B.²

9
- 0037258161
- D. Padhi, J. Yahalom, S. Gandikota, G. Dixit, J. Electrochem. Soc., 150 (2003) G10.
- (2003) J. Electrochem. Soc. , vol.150
- Padhi, D.¹ Yahalom, J.² Gandikota, S.³ Dixit, G.⁴

10
- 0022404042
- S.H. Glarum, J. Electrochem. Soc., 132 (1985) 2878.
- (1985) J. Electrochem. Soc. , vol.132 , pp. 2878
- Glarum, S.H.¹

11
- 84873826235
- S.H. Glarum, J. Electrochem. Soc., 148 (2001) B146.
- (2001) J. Electrochem. Soc. , vol.148
- Glarum, S.H.¹

12
- 65949120412
- A. Tripathi, I.I. Suni, Y. Li, F. Doniat, J. McAndrew, J. Electrochem. Soc., 156 (2009) H555.
- (2009) J. Electrochem. Soc. , vol.156
- Tripathi, A.¹ Suni, I.I.² Li, Y.³ Doniat, F.⁴ Mcandrew, J.⁵

13
- 63649134372
- B.S. Kim, S.P. Beaudoin, J. Electrochem. Soc., 156 (2009) H390.
- (2009) J. Electrochem. Soc. , vol.156
- Kim, B.S.¹ Beaudoin, S.P.²

14
- 3242707119
- J.-M. Shieh, S.-C. Chang, Y.-L. Wang, B.-T. Dai, S.-S. Cheng, J. Ting, J. Electrochem. Soc., 151 (2004) C459.
- (2004) J. Electrochem. Soc. , vol.151
- Shieh, J.-M.¹ Chang, S.-C.² Wang, Y.-L.³ Dai, B.-T.⁴ Cheng, S.-S.⁵ Ting, J.⁶

15
- 0036026396
- S.-C. Chang, J.-M. Shieh, C.-C. Huang, B.-T. Dai, Y.-H. Li, M.-S. Feng, J. Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 20 (2002) 2149.
- (2002) J. Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.20 , pp. 2149
- Chang, S.-C.¹ Shieh, J.-M.² Huang, C.-C.³ Dai, B.-T.⁴ Li, Y.-H.⁵ Feng, M.-S.⁶

16
- 0000064772
- B. Pointu, M. Braizaz, P. Poncet, J. Rousseau, J. Electroanal. Chem. Interfacial Electrochem., 122 (1981) 111-131.
- (1981) J. Electroanal. Chem. Interfacial Electrochem. , vol.122 , pp. 111-131
- Pointu, B.¹ Braizaz, M.² Poncet, P.³ Rousseau, J.⁴

17
- 33846956507
- S. Van Gils, C. Le Pen, A. Hubin, H. Terryn, E. Stijns, J. Electrochem. Soc., 154 (2007) C175.
- (2007) J. Electrochem. Soc. , vol.154
- Van Gils, S.¹ Le Pen, C.² Hubin, A.³ Terryn, H.⁴ Stijns, E.⁵

18
- 77953168671
- T.-M. Kung, C.-P. Liu, S.-C. Chang, K.-W. Chen, Y.-L. Wang, J. Electrochem. Soc., 157 (2010) H763.
- (2010) J. Electrochem. Soc. , vol.157
- Kung, T.-M.¹ Liu, C.-P.² Chang, S.-C.³ Chen, K.-W.⁴ Wang, Y.-L.⁵

19
- 33749617763
- M. De Koninck, S.-C. Poirier, B.t. Marsan, J. Electrochem. Soc., 153 (2006) A2103
- (2006) J. Electrochem. Soc. , vol.153
- De Koninck, M.¹ Poirier, S.-C.² Marsan, B.t.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.