Electropolishing of copper in H3PO4: Ex situ and in situ optical characterization

Journal of the Electrochemical Society

Volumn 154, Issue 3, 2007, Pages

  Van Gils, S ^a,c   Le Pen, C ^a,d   Hubin, A ^a,b   Terryn, H ^a   Stijns, E ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^b ELECTROCHEMICAL SOCIETY

^c Onderzoekscentrum voor de Aanwending van Staal   (Belgium)

^d ArcelorMittal Gent   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CHEMICAL MODIFICATION; ELECTROLYTIC POLISHING; ELLIPSOMETRY; PROFILOMETRY; SURFACE ROUGHNESS; SURFACE TOPOGRAPHY;

OPTICAL CHARACTERIZATION; OPTICAL PROFILOMETRY; OPTICAL TECHNIQUES;

COPPER;

EID: 33846956507     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2429044     Document Type: Article

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