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International Journal of Electrochemical Science

Volumn 7, Issue 10, 2012, Pages 9271-9277

Effect of sodium dodecyl sulfate on copper anodic dissolution in phosphoric acid solution

(7) Li, Deyu a Li, Ning a Xia, Guofeng a Xiao, Ning a Zheng, Zhen a Zhai, Wenjie a Wu, Gang b

a HARBIN INSTITUTE OF TECHNOLOGY (China)

b LOS ALAMOS NATIONAL LABORATORY (United States)

Author keywords

Cu; Electrochemical mechanical planarization; Inhibitor; Phosphoric acid; Sodium dodecyl sulfate

Indexed keywords

EID: 84872835098 PISSN: None EISSN: 14523981 Source Type: Journal
DOI: None Document Type: Article

Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.