Resonance frequency of locally heated cantilever beams

Sensors and Actuators, A: Physical

Volumn 190, Issue , 2013, Pages 6-12

  Iervolino, E ^a,c   Riccio, M ^b   Santagata, F ^c   Wei, J ^c   Van Herwaarden, A W ^a   Irace, A ^b   Breglio, G ^b   Sarro, P M ^c  

^a Xensor Integration ^*  (Netherlands)

^b UNIVERSITY OF NAPLES FEDERICO II   (Italy)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Cantilever beam; Integrated heater; Resonance frequency

Indexed keywords

BEST CHOICE; FREQUENCY SHIFT; HEATER TEMPERATURES; INTEGRATED HEATER; IR CAMERA; RESONANCE FREQUENCIES; TEMPERATURE DEPENDENCE; THEORETICAL RESULT; THEORETICAL STUDY;

NATURAL FREQUENCIES; SILICON NITRIDE; TEMPERATURE DISTRIBUTION;

CANTILEVER BEAMS;

EID: 84870904364     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.10.008     Document Type: Article

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