Competition between the thermal gradient and the bimorph effect in locally heated MEMS actuators

Journal of Micromechanics and Microengineering

Volumn 19, Issue 1, 2009, Pages

  Jeppesen, C ^a   Molhave, K ^a   Kristensen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

COMPETITION; THERMAL GRADIENTS;

BEHAVIOR ANALYSIS; BI MATERIALS; FINITE-ELEMENT MODELING; MEMS ACTUATORS; MEMS/NEMS; POLYMER BASED;

THERMOANALYSIS;

EID: 62649102215     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/1/015008     Document Type: Article

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