MEMS resonator temperature compensation

2010 11th International Conference on Thermal, Mechanical and Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems, EuroSimE 2010

Volumn , Issue , 2010, Pages

  Casset, F ^a   Durand, C ^b   Civet, Y ^c   Ollier, E ^a   Carpentier, J F ^b   Ancel, P ^b   Robert, P ^a  

^a CEA GRENOBLE   (France)

^b STMICROELECTRONICS   (France)

^c TIMA LABORATORY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS COMPATIBLE; COATING MATERIAL; ELECTROMECHANICAL RESONATORS; MEMS RESONATORS; SILICON RESONATORS; SIMULATED RESULTS; STRUCTURAL MATERIALS; TEMPERATURE COMPENSATION;

BUILDING MATERIALS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROSYSTEMS; RESONATORS; TEMPERATURE DISTRIBUTION;

EXPERIMENTS;

EID: 77953726904     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESIME.2010.5464619     Document Type: Conference Paper

References (15)

1. YW. Lin et aI, "60-MHz Wine-Glass Micromechanical-Disk Reference Oscillator", Digest of Technical Paper, 2004 IEEE Int. Solid-State Circuits Conference (ISSCC), Feb. 15-19, 2004, pp. 322-323.
2. JV. Kaajakari et al, "Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low Phase Noise Oscillator Applications", IEEE Electron Device Letters, Vol. 25, no4 (2004), pp. 173-175.
3. K. Sundaresan et al, "Electronically Temperature Compensated Silicon Bulk Acoustic Resonator Reference Oscillators", IEEE Journal of Solid-State Circuits, Vol. 42, no6 (2007), pp. 433-442.
4. nd International conference on Micro Electro Mechanical Systems (MEMS 2009), 25-29 January, pp. 661-664.
5. K. Wang et aI, "VHF Free-Free Beam High-Q Micromechanical Resonators", Journal of Microelectromechanical Systems, Vol. 9, no 3 (2000), pp. 347-360
6. S. Pourkamali et aI, "VHF Single Crystal Silicon Capacitive Elliptic Bulk-Mode Disk Resonators - Part II: Implementation and Characterization", Journal of Microelectromechanical Systems, Vol. 13, no6 (2004), pp. 1054-1061.
7. Y. Xie et aI, "UHF Micromechanical Extentional Wine-Glass Mode Ring Resonators", Technical Digest, 2003 IEEE Int. Electron Devices Meeting, December 8-10 2003, pp. 953-956.
8. JR. Clark et aI, "High-Q UHF Micromechanical Radial-Contour Mode Disk Resonators", Journal of Microelectromechanical Systems, Vol. 14, no6 (2005), pp. 1298-1309.
9. S. Pourkamali," Low-Impedance VHF and UHF Capacitive Silicon Bulk Acoustic-Wave Resonators - Part II: Measurement and Characterization", IEEE Transactions on Electron Devices, Vol. 54, no8 (2007), pp. 2024-2030.
10. M. Koskenvuori et aI, "Temperature Measurement and Compasation Based on Two Vibriting Modes of a Bulk Acoustic Mode Microresonator ", IEEE 21st International conference on Micro Electro Mechanical Systems (MEMS 2008), January 13-17, 2008, pp. 78-81.
11. Durand et aI, "Characterization of In-IC integrable in-plane nanometer scale resonator fabricated by a silicon on nothing advanced technology", IEEE 21st International conference on Micro Electro Mechanical Systems (MEMS 2008), January 13-17, 2008, pp. 1016-1019.
12. R. Melamud et al, "Effect of stress on the temperature coefficient of frequency in double clamped resonators", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), 5-9 June 2005, pp. 392-395.
13. R. Abdolvand et al, "A low voltage temperature-stable micromechanical piezoelectric oscillator", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '07)), 10-14 June 2007, pp. 53-56.
14. D. Grogg et aI, "Bulk lateral MEM Resonator on thin SOl with high Q-factor", Journal of Microelectromechanical Sustems, Vol. 18, no2 (2009), pp. 466-479.
15. nd International conference on Micro Electro Mechanical Systems (MEMS 2009), 25-29 January, pp. 884-887.