Out-of-plane spiral-coil inductor self-assembled by locally controlled bimorph actuation

Micro and Nano Letters

Volumn 6, Issue 12, 2011, Pages 1016-1018

  Ali, M S Mohamed ^a,b   Bycraft, B ^a   Schlosser, C ^a   Assadsangabi, B ^a   Takahata, K ^a  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

^b UNIVERSITI TEKNOLOGI MALAYSIA   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

BIMORPH ACTUATION; COIL SHAPE; MICROCOILS; OUT-OF-PLANE; POST-FABRICATION; Q-FACTORS; SELF-ASSEMBLED; SPIRAL STRUCTURES; STRESS LAYERS; VERTICAL DEFORMATION; VERTICAL DIRECTION;

DEFORMATION; INDUCTANCE;

THREE DIMENSIONAL;

CHROMIUM; COPPER; PLASTIC;

ARTICLE; CONTROLLED STUDY; MICROCOIL INDUCTOR; NANOFABRICATION; TELECOMMUNICATION; TEMPERATURE;

EID: 84555220449     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl.2011.0581     Document Type: Article

References (15)

1. Rao, N.B., and Chandorkar, A.N.: ' 3D inductor for RF applications ', J. Microw. Opt. Technol., 2008, 3, p. 445-449
2. Fry, N., Makhnovskiy, D.P., Panina, L.V., Sandacci, S.I., Mapps, D.J., and Akhter, M.: ' Off-diagonal magnetoimpedance in NiFe-Au-NiFe layered film and its application to linear magnetic sensors ', IEEE Trans. Magn., 2004, 40, p. 3358-3367 10.1109/TMAG.2004.831667 0018-9464
3. Klein, M.J.K., Ono, T., Esashi, M., and Korvink, J.G.: ' RIE of solenoidal microcoil glass mould with integrated sample container for micro-MRI ', IEEE Micro Electr. Mech. Syst., 2007, p. 345-348 10.1109/MEMSYS.2007.4433106
4. Kratt, K., Badilita, V., Burger, T., Korvink, J.G., and Wallrabe, U.: ' A fully MEMS-compatible process for 3D high aspect ratio micro coils obtained with an automatic wire bonder ', J. Micromech. Microeng., 2009, 20, p. 015021 10.1088/0960-1317/20/1/015021 0960-1317
5. Gel, M., Takeuchi, S., and Shimoyama, I.: ' Fabrication method for out-of-plane, micro-coil by surface micromachining ', Sens. Actuat. A: Phys., 2002, 97-98, p. 702-708 10.1016/S0924-4247(02)00007-9 (Pubitemid 34758785)
6. Fukushige, T., Hata, S., and Shimokohbe, A.: ' A MEMS conical spring actuator array ', J. Microelectromech. Syst., 2005, 14, p. 243-253 10.1109/JMEMS.2004.839345 1057-7157 (Pubitemid 40679615)
7. Mekaru, H., Kusumi, S., and Sato, N.: et al. ' Fabrication of a spiral microcoil using a 3D-LIGA process ', Microsyst. Technol., 2005, 13, p. 393-402 10.1007/s00542-006-0202-3 0946-7076
8. Woytasik, M., Grandchamp, J.P., and Dufour-Gergam, E.: et al. ' Fabrication of planar and three-dimensional microcoils on flexible substrates ', Microsyst. Technol., 2006, 12, p. 973-978 10.1007/s00542-006-0135-x 0946-7076 (Pubitemid 44267987)
9. Park, P., Kim, C.S., Park, M.Y., Kim, S.D., and Yu, H.K.: ' Variable inductance multilayer inductor with MOSFET switch control ', IEEE Electron Device Lett., 2004, 25, p. 144-146 10.1109/LED.2003.822670 0741-3106
10. Chang, S., and Sivoththaman, S.: ' A tunable RF MEMS inductor on silicon incorporating an amorphous silicon bimorph in a low-temperature process ', IEEE Electron Device Lett., 2006, 27, p. 905-907 10.1109/LED.2006.884712 0741-3106 (Pubitemid 44660648)
11. Kaneko, Y., Hashimoto, K., and Horiuchi, T.: ' Fabrication of micro-coils using laser scan lithography on copper pipes ', Microelectron. Eng., 2006, 83, p. 1249-1252 10.1016/j.mee.2006.01.102 0167-9317
12. Sillerud, L.O., McDowell, A.F., and Adolphi, N.L.: et al. ' 1H detection of superparamagnetic nanoparticles at 1 T using a microcoil and novel tuning circuit ', J. Magn. Resonance, 2006, 181, p. 181-190 10.1016/j.jmr.2006.04.005 (Pubitemid 44107731)
13. Williams, K., Maxwell, J., Larsson, K., and Boman, M.: ' Freeform fabrication of functional microsolenoids, electromagnets and helical springs using high-pressure laser chemical vapor deposition ', IEEE Micro Electr. Mech. Syst., 1999, p. 232-237 10.1109/MEMSYS.1999.746821
14. Mohamed Ali, M.S., and Takahata, K.: ' Frequency-controlled wireless shape-memory-alloy microactuators integrated using an electroplating bonding process ', Sens. Actuat. A: Phys., 2010, 163, p. 363-372 10.1016/j.sna.2010.08. 007
15. Yue, C.P., and Wong, S.S.: ' On-chip spiral inductors with patterned ground shields for Si-based RF ICs ', IEEE J. Solid State Circ., 1998, 33, p. 743-752 10.1109/4.668989