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Applied Physics Letters

Volumn 101, Issue 6, 2012, Pages

Transfer printing of flexible hybrid inductor-capacitor filters via pre-etched silicon-on-insulator mother wafer

(3) Pang, Liang a Seo, Hui Chan a,b Kim, Kyekyoon Kevin a

a University of Illinois at Urbana Champaign (United States)

b NONE

Author keywords

[No Author keywords available]

Indexed keywords

DEVICE FABRICATIONS; ELASTOMERIC SUBSTRATES; LC FILTER; MECHANICAL INSTABILITIES; SILICON ON INSULATOR; SILICON ON INSULATOR WAFERS; TRANSFER PRINTING;

CAPACITORS; ELECTRONIC PROPERTIES; PRINTING;

SILICON WAFERS;

EID: 84865142745 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4742341 Document Type: Article

Times cited : (1)

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