High-Q micromachined inductors for 10-to-30-GHz RFIC applications on low resistivity Si-substrate

Proceedings of the 36th European Microwave Conference, EuMC 2006

Volumn , Issue , 2006, Pages 56-59

  Wang, To Po ^a   Wang, Huei ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Micromachined inductors; Quality factor; Self resonance frequency; Si substrate

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROMACHINING; NATURAL FREQUENCIES; SILICON;

MICROMACHINED INDUCTORS; QUALITY FACTORS;

ELECTRIC INDUCTORS;

EID: 41649109032     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2006.281180     Document Type: Conference Paper

References (10)

1. S. W. Paek and K. S. Seo, "Air-gap stacked spiral inductor," IEEE Microwave and Guided Wave Letters, vol. 7, pp. 329-331, Oct. 1997.
2. J. Y.-C. Chang, A. A. Abidi, and M. Gaitan, "Large suspended inductors on silicon and their use in a 2-um CMOS RF amplifier," IEEE Electron Device Letters vol. 14. no. 5, pp.246-248, May 1993.
3. C. P. Yue, and S. S. Wong, "On-chip spiral inductors with patterned ground shields for Si-based RF IC's," IEEE J. Solid-State Circuits, vol. 33, pp. 743-752, May 1998.
4. Y. S. Choi, E. Yoon, and J. B. Yoon, "Encapsulation of the micromachined air-suspended inductors," in IEEE MTT-S Int. Microwave Symp. Dig., 2003, pp. 1637-1640.
5. W. C. Hon, J. Zhang, L. L. W. Leung, and K. J. Chen, "High-Q CMOS-compatible micromachined edge-suspended spiral inductors," in IEEE RFIC Symp., 2004, pp. 263-266.
6. J. W. Lin, C. C. Chen, and Y. T. Cheng, "A robust high-Q micromachined RF inductor for RFIC applications," IEEE Trans. Electron Devices, vol. 52, pp. 1489-1496, July 2005.
7. L. H. Lu, G. E. Ponchak, P. Bhattacharya, and L. P. B. Katehi, "High-Q X-band and K-band micromachined spiral inductors for use in Si-based integrated circuits", in Silicon Monolithic Integrated Circuits in RF Systems, Symp. Dig., pp. 108-112.
8. T. P. Wang, R. C. Liu, H. Y. Chang, L. H. Lu, and H. Wang, "A 22-GHz push-push CMOS oscillator using micromachined inductors," IEEE Microwave and Wireless Component Letters, vol. 15, Dec. 2005.
9. T. P. Wang, R. C. Liu, H. Y. Chang, J. H. Tsai. L. H. Lu, and H. Wang, "A 30-GHz low-phase-noise 0.35-um CMOS push-push oscillator using micromachined inductors," IEEE MTT-S Int. Microwave Symp. Dig., 2006.
10. Design Manual for TSMC/GCTC 0.35-μm CMOS MEMS Process, Chip Implementation Center, Taiwan, 2004.