Thickness determination of subnanometer layers using laser ablation inductively coupled plasma mass spectrometry

Analytical Chemistry

Volumn 84, Issue 20, 2012, Pages 8771-8776

  Hattendorf, Bodo ^a   Pisonero, Jorge ^b   Günther, Detlef ^a   Bordel, Nerea ^b  

^a ETH ZURICH   (Switzerland)

^b UNIVERSITY OF OVIEDO   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AL COATINGS; CRATER SIZES; EXTERNAL CALIBRATION; ION SIGNALS; LASER-ABLATION INDUCTIVELY-COUPLED PLASMA MASS SPECTROMETRY; LAYER THICKNESS; LINEAR CORRELATION; METALLIC LAYERS; REFERENCE MATERIAL; SI WAFER; STANDARD REFERENCE MATERIAL; SUBNANOMETERS; THICKNESS DETERMINATION;

ALUMINUM COATINGS; GLASS; INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY; LASER ABLATION; LASERS; SILICON WAFERS;

ABLATION;

EID: 84869480769     PISSN: 00032700     EISSN: 15206882     Source Type: Journal    
DOI: 10.1021/ac302137x     Document Type: Article

References (41)

1. Balcaen, L. I. L.; Lenaerts, J.; Moens, L.; Vanhaecke, F. J. Anal. At. Spectrom. 2005, 20, 417-423.
2. Bleiner, D.; Plotnikov, A.; Vogt, C.; Wetzig, K.; Gunther, D.; Fresenius, J. Anal. Chem. 2000, 368, 221-226.
3. Coedo, A. G.; Dorado, T.; Padilla, I.; Farinas, J. C. J. Anal. At. Spectrom. 2005, 20, 612-620.
4. Hrdlicka, A.; Otruba, V.; Novotny, K.; Gunther, D.; Kanicky, V. Spectrochim. Acta B 2005, 60, 307-318.
5. Pisonero, J.; Koch, J.; Wale, M.; Hartung, W.; Spencer, N. D.; Günther, D. Anal. Chem. 2007, 79, 2325-2333.
6. Plotnikov, A.; Vogt, C.; Hoffmann, V.; Taschner, C.; Wetzig, K. J. Anal. At. Spectrom. 2001, 16, 1290-1295.
7. Sugiyama, D.; Chida, T.; Cowper, M. Radiochim. Acta 2008, 96, 747-752.
8. Zaoralkova, L.; Hrdlicka, A.; Otruba, V.; Sulovsky, P.; Gilon, N.; Gunther, D.; Kanicky, V. Chem. Pap. 2011, 65, 769-781.
9. Boardman, A. D.; Cresswell, B.; Anderson, J. Appl. Surf. Sci. 1996, 96-8, 55-60.
10. Hergenroder, R. J. Anal. At. Spectrom. 2006, 21, 505-516.
11. Jeffries, T. E.; Pearce, N. G.; Perkins, W. T.; Raith, A. Anal. Commun. 1996, 33, 35-39.
12. Mikova, J.; Kosler, J.; Longerich, H. P.; Wiedenbeck, M.; Hanchar, J. M. J. Anal. At. Spectrom. 2009, 24, 1244-1252.
13. Babechuk, M. G.; Kamber, B. S.; Greig, A.; Canil, D.; Kodolanyi, J. Geochim. Cosmochim. Acta 2010, 74, 1448-1470.
14. Bleiner, D.; Chen, Z. Y.; Autrique, D.; Bogaerts, A. J. Anal. At. Spectrom. 2006, 21, 910-921.
15. Bogaerts, A.; Chen, Z. Y. Spectrochim. Acta B 2005, 60, 1280-1307.
16. Mateo, M. P.; Garcia, C. C.; Hergenroder, R. Anal. Chem. 2007, 79, 4908-4914.
17. Alberts, D.; Fernandez, B.; Frade, T.; Gomes, A.; Pereira, M. I. D.; Pereiro, R.; Sanz-Medel, A. Talanta 2011, 84, 572-578.
18. Valledor, R.; Pisonero, J.; Bordel, N.; Martin, J. I.; Quiros, C.; Tempez, A.; Sanz-Medel, A. Anal. Bioanal. Chem. 2010, 396, 2881-2887.
19. Fernandez, B.; Pereiro, R.; Sanz-Medel, A. Anal. Chim. Acta 2010, 679, 7-16.
20. Galindo, R. E.; Gago, R.; Duday, D.; Palacio, C. Anal. Bioanal. Chem. 2010, 396, 2725-2740.
21. Nelis, T.; Pallosi, J. Appl. Spectrosc. Rev. 2006, 41, 227-258.
22. Pisonero, J.; Lobo, L.; Bordel, N.; Tempez, A.; Bensaoula, A.; Badi, N.; Sanz-Medel, A. Sol. Energy Mater. Sol. Cells 2010, 94, 1352-1357.
23. Tolstoguzov, A. B. J. Anal. Chem. 2010, 65, 1370-1376.
24. Lobo, L.; Fernandez, B.; Pereiro, R.; Bordel, N.; Demenev, E.; Giubertoni, D.; Bersani, M.; Honicke, P.; Beckhoff, B.; Sanz-Medel, A. J. Anal. At. Spectrom. 2011, 26, 542-549.
25. Ferrari, S.; Perego, A.; Fanciulli, A. Appl. Surf. Sci. 2003, 203, 52-55.
26. Pisonero, J.; Fernandez, B.; Pereiro, R.; Bordel, N.; Sanz-Medel, A. TrAC, Trends Anal. Chem. 2006, 25, 11-18.
27. Pelaez, M. V.; Costa-Fernandez, J. M.; Pereiro, R.; Bordel, N.; Sanz-Medel, A. J. Anal. At. Spectrom. 2003, 18, 864-871.
28. Hoffmann, V.; Dorka, R.; Wilken, L.; Hodoroaba, V. D.; Wetzig, K. Surf. Interface Anal. 2003, 35, 575-582.
29. Pisonero, J.; Fernandez, B.; Gunther, D. J. Anal. At. Spectrom. 2009, 24, 1145-1160.
30. Gunther, D.; Hattendorf, B. TrAC, Trends Anal. Chem. 2005, 24, 255-265.
31. Mank, A. J. G.; Mason, P. R. D. J. Anal. At. Spectrom. 1999, 14, 1143-1153.
32. Garcia, C. C.; Lindner, H.; Niemax, K. Spectrochim. Acta B 2007, 62, 13-19.
33. Garcia, C. C.; Walle, M.; Lindner, H.; Koch, J.; Niemax, K.; Gunther, D. Spectrochim. Acta B 2008, 63, 271-276.
34. Horn, I.; Gunther, D. Appl. Surf. Sci. 2003, 207, 144-157.
35. Muller, W.; Shelley, M.; Miller, P.; Broude, S. J. Anal. At. Spectrom. 2009, 24, 209-214.
36. Woodhead, J.; Hellstrom, J.; Maas, R.; Hergt, J.; Shelley, M.; Eggins, S.; Kemp, R. Geochim. Cosmochim. Acta 2003, 67, A536-A536.
37. Wang, Z. K.; Hattendorf, B.; Günther, D. J. Am. Soc. Mass Spectrom. 2006, 17, 641-651.
38. Quiros, C.; Martin, J. I.; Zarate, L.; Velez, M.; Alameda, J. M. Phys. Rev. B 2005, 71.
39. Eggins, S. M.; Shelley, J. M. G. Geostand. Newsl. 2002, 26, 269-286.
40. Lide, D. R., Ed. Handbook of Chemistry and Physics; CRC Press Inc.: Boca Raton, FL, 2006; Vol. 86.
41. Jochum, K. P.; Stoll, B. http://georem.mpch-mainz.gwdg.de/ (accessed September 27, 2012), 2008