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Volumn 65, Issue 13, 2010, Pages 1370-1376

Multilayer thin-film coatings based on chromium nitride and aluminum nitride: Comparative depth profiling by secondary ion mass spectrometry and glow-discharge optical emission spectrometry

(1) Tolstoguzov, A B a

a UNIVERSIDADE NOVA DE LISBOA (Portugal)

Author keywords

depth potiling; glow discharge optical emission spectrometry (GD OES); ion sputtering; nitride multilayer coatings; round robin characterization; secondary ion mass spectrometry (SIMS)

Indexed keywords

ALUMINUM COATINGS; ALUMINUM NITRIDE; CHROMIUM COMPOUNDS; FILM PREPARATION; GLOW DISCHARGES; IONS; LIGHT EMISSION; MULTILAYERS; NICKEL ALLOYS; NICKEL COATINGS; NITRIDES; OPTICAL EMISSION SPECTROSCOPY; OPTICAL MULTILAYERS; ROUTERS; SECONDARY EMISSION; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; SURFACE TOPOGRAPHY;

DEPTH POTILING; GLOW DISCHARGE OPTICAL EMISSION SPECTROMETRIES; ION SPUTTERING; NITRIDE MULTILAYER COATINGS; ROUND ROBIN;

DEPTH PROFILING;

EID: 78650506553 PISSN: 10619348 EISSN: None Source Type: Journal
DOI: 10.1134/S1061934810130101 Document Type: Article

Times cited : (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.