Adsorption features of phthalates and organophosphorus compounds on silicon wafers

Industrial and Engineering Chemistry Research

Volumn 51, Issue 45, 2012, Pages 14665-14672

  Tlili, Sabrine ^a,b   Hayeck, Nathalie ^a,b   Gligorovski, Sasho ^a,b   Wortham, Henri ^a,b  

^a AIX MARSEILLE UNIV   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION CONSTANT; AMBIENT CONCENTRATIONS; DESORPTION BEHAVIOR; DIETHYL PHTHALATE; INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS; MICRO-ELECTRONIC DEVICES; ORGANIC CONTAMINANT; ORGANIC CONTAMINATION; ORGANOPHOSPHORUS COMPOUNDS; PHTHALATES; SILICON WAFER SURFACE; SURFACE CONCENTRATION; TIME-DEPENDENT; TIME-DEPENDENT CHANGES;

ADSORPTION; DESORPTION; ESTERS; MICROELECTRONICS; PHOSPHORUS COMPOUNDS; POTASSIUM COMPOUNDS; SILICON;

SILICON WAFERS;

EID: 84869440866     PISSN: 08885885     EISSN: 15205045     Source Type: Journal    
DOI: 10.1021/ie301501b     Document Type: Article

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