Short time deposition kinetics of diethyl phthalate and dibutyl phthalate on a silicon wafer surface

Industrial and Engineering Chemistry Research

Volumn 45, Issue 4, 2006, Pages 1331-1336

  Kang, Yuhao ^a   Den, Walter ^b   Bai, Hsunling ^a,c  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b TUNGHAI UNIVERSITY   (Taiwan)

^c NONE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CONCENTRATION (PROCESS); DEPOSITION; DESORPTION; MOLECULAR WEIGHT; REACTION KINETICS; SILICON WAFERS;

AIRBORNE MOLECULAR CONTAMINATION; DIBUTYL PHTHALATE; DIETHYL PHTHALATE; STICKING COEFFICIENT;

ESTERS;

ADSORPTION; CONCENTRATION (PROCESS); DEPOSITION; DESORPTION; ESTERS; MOLECULAR WEIGHT; REACTION KINETICS; SILICON WAFERS;

EID: 33644764058     PISSN: 08885885     EISSN: None     Source Type: Journal    
DOI: 10.1021/ie050754s     Document Type: Article

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