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Volumn 157, Issue 5, 2010, Pages

Humidity and temperature dependences of the adsorption and desorption rates for acetone and xylene on silicon wafer

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION ENTHALPIES; AMBIENT TEMPERATURES; CLEANING PROCESS; DATA SETS; DESORPTION RATE; DESORPTION RATE CONSTANTS; EXPERIMENTAL SETUP; GAS-PHASE CONCENTRATION; LANGMUIR CONSTANT; RELATIVE HUMIDITIES; TEMPERATURE DEPENDENCE; TEMPERATURE DEPENDENT;

EID: 77951200013     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3321964     Document Type: Article
Times cited : (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.