Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 634-645

  Acar, Cenk ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CAPACITANCE; ELECTRONICS PACKAGING; MICROELECTRONIC PROCESSING; MICROSENSORS; SEMICONDUCTOR DEVICE MODELS; TEMPERATURE;

MICROMACHINED ACCELEROMETERS; SENSOR DESIGN;

MICROELECTROMECHANICAL DEVICES;

EID: 0141607072     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/315     Document Type: Article

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