Single domain m-plane ZnO grown on m-plane sapphire by radio frequency magnetron sputtering

ACS Applied Materials and Interfaces

Volumn 4, Issue 10, 2012, Pages 5333-5337

  Lin, B H ^a,b   Liu, W R ^b   Lin, C Y ^a,c   Hsu, S T ^a   Yang, S ^a   Kuo, C C ^a   Hsu, C H ^a,b   Hsieh, W F ^a   Chien, F S S ^c   Chang, C S ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER   (Taiwan)

^c TUNGHAI UNIVERSITY   (Taiwan)

Author keywords

non polar ZnO; RF magnetron sputtering; strain; structural defects

Indexed keywords

BIAXIAL STRAINS; DOMAIN MATCHING EPITAXY; EPITAXIAL RELATIONSHIPS; HEXAGONAL LATTICE; HIGH QUALITY; INTERFACE STRUCTURES; M-PLANE; MICRO RAMAN SPECTROSCOPY; MICRO-RAMAN; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-MAGNETRON SPUTTERING; SINGLE DOMAINS; STRUCTURAL DEFECT; STRUCTURE CHARACTERISTIC; SYNCHROTRON X-RAY SCATTERING; TRANSMISSION ELECTRON MICROSCOPY TEM; VIBRATIONAL PROPERTIES; XRD; ZNO; ZNO BUFFER LAYER; ZNO FILMS;

EPITAXIAL GROWTH; MAGNETRON SPUTTERING; RADIO WAVES; RAMAN SPECTROSCOPY; SAPPHIRE; STRAIN; TRANSMISSION ELECTRON MICROSCOPY;

ZINC OXIDE;

EID: 84867796547     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am301271k     Document Type: Article

References (20)

1. Bernardini, F.; Fiorentini, V.; Vanderbilt, D. Phys. Rev. B 1997, 56, R10024
2. Gil, B.; Lefebvre, P.; Bretagnon, T.; Guillet, T.; Sans, J. A.; Taliercio, T.; Morhain, C. Phys. Rev. B 2006, 74, 153302
3. Iwata, K.; Asahi, H.; Asami, K.; Kuroiwa, R.; Gonda, S. Jpn J. Appl. Phys. 1997, 36, L661
4. Lee, J. W.; Kim, J.-H.; Han, S. K.; Hong, S.-K.; Lee, J. Y.; Hong, S. I.; Yao, T. J. Cryst. Growth 2010, 312, 238
5. Baker, T. J.; Haskell, B. A.; Wu, F.; Speck, J. S.; Nakamura, S. Jpn J. Appl. Phys. 2006, 45, L154
6. Lahourcade, L.; Bellet-Amalric, E.; Monroy, E.; Abouzaid, M.; Ruterana, P. Appl. Phys. Lett. 2007, 90, 131909
7. Onuma, T.; Amaike, H.; Kubota, M.; Okamoto, K.; Ohta, H.; Ichihara, J.; Takasu, H; Chichibu, S. F. Appl. Phys. Lett. 2007, 91, 181903
8. Kuo, C. C.; Lin, B. H.; Yang, Song; Liu, W. R.; Hsieh, W. F.; Hsu, C.-H. Appl. Phys. Lett. 2012, 101, 011901
9. Chauveau, J.-M.; Vennéguès, P.; Laügt, M.; Deparis, C.; Zuniga-Perez, J.; Morhain, C. J. Appl. Phys. 2008, 104, 073535
10. Ku, C.-S.; Lee, H.-Y.; Huang, J.-M.; Lin, C.-M. Cryst. Growth Des. 2010, 10, 1460
11. Chou, M. M. C.; Chang, L.; Hang, D.-R.; Chen, C.; Chang, D.-S.; Li, C.-A. Cryst. Growth Des. 2009, 9, 2073
12. Wang, W.-L.; Ho, Y.-T.; Chiu, K.-A.; Peng, Chun-Yen; Chang, L. J. Cryst. Growth 2010, 312, 1179
13. Atuchin, V. V.; Galashov, E. N.; Kozhukhov, A. S.; Pokrovsky, L. D.; Shlegel, V. N. J. Cryst. Growth 2011, 318, 1147
14. Lin, H.; Zhou, S.; Huang, T.; Teng, H.; Liu, X.; Gu, S.; Zhu, S.; Xie, Z.; Han, P.; Zhang, R. J. Alloys Compd. 2009, 467, L8
15. Cagin, E.; Yang, J.; Wang, W.; Phillips, J. D.; Hong, S. K.; Lee, J. W.; Lee, J. Y. Appl. Phys. Lett. 2008, 92, 233505
16. Armitage, R.; Hirayama, H. Appl. Phys. Lett. 2008, 92, 092121
17. Kim, J.-H.; Han, S. K.; Hong, S. I.; Hong, S.-K.; Lee, J. W.; Lee, J. Y.; Song, J.-H.; Park, J. S.; Yao, T. J. Vac. Sci. Technol. B 2009, 27, 1625
18. Narayan, J.; Larson, B. C. J. Appl. Phys. 2003, 93, 278
19. Chakraborty, A.; Haskell, B. A.; Keller, S.; Speck, J. S.; Denbaars, S. P.; Nakamura, S.; Mishra, U. K. Jpn J. Appl. Phys. 2005, 44, L173
20. Damen, T. C.; Porto, S. P. S.; Tell, B. Phys. Rev. 1966, 142, 570