X-ray lithography and small-angle X-ray scattering: A combination of techniques merging biology and materials science

European Biophysics Journal

Volumn 41, Issue 10, 2012, Pages 851-861

  Marmiroli, B ^a   Amenitsch, H ^a  

^a ERICH SCHMID INSTITUTE OF MATERIALS SCIENCE   (Austria)

Author keywords

Bottom up top down manufacturing; Deep X ray lithography; Radiation assisted material synthesis and processing; Small angle scattering

Indexed keywords

NANOMATERIAL;

CHEMISTRY; INSTRUMENTATION; METHODOLOGY; REVIEW; SMALL ANGLE SCATTERING; X RAY DIFFRACTION;

NANOSTRUCTURES; SCATTERING, SMALL ANGLE; X-RAY DIFFRACTION;

EID: 84867571092     PISSN: 01757571     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00249-012-0843-3     Document Type: Review

References (62)

1. Amenitsch H, Marmiroli B (2011) Time-resolved structure investigation with small-angle X-ray scattering using scanning techniques. Rendiconti Lincei 22:S93-S107
2. Amenitsch H, Bernstorff S, Kriechbaum M, Lombardo D, Mio H, Rappolt M, Laggner P (1997) Performance and first results of the ELETTRA high-flux beamline for small-angle X-ray scattering. J Appl Crystallogr 30:872-876
3. Becker EW, Ehrfeld W, Hagmann P, Maner A, Muenchmeyer D (1986) Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process). Microelectron Eng 4:35-56
4. Brinker CJ, Dunphy DR (2006) Morphological control of surfactanttemplated metal oxide films. Curr Opin Colloid Interface Sci 11:126-132
5. Choi BCK, Pak AWP (2006) Multidisciplinarity, interdisciplinarity and transdisciplinarity in health research, services, education and policy: 1. Definitions, objectives, and evidence of effectiveness. Clin Investig Med 29:351-364
6. Costacurta S, Malfatti L, Patelli A, Falcaro P, Amenitsch H, Marmiroli B, Grenci G, Piccinini M, Innocenzi P (2010) Deep X-ray lithography for direct patterning of PECVD films. Plasma Process Polym 7:459-465
7. Costacurta S, Falcaro P, Malfatti L, Marongiu D, Marmiroli B, Cacho-Nerin F, Amenitsch H, Kirkby N, Innocenzi P (2011) Shaping mesoporous films using dewetting on X-ray prepatterned hydrophilic/hydrophobic layers and pinning effects at the pattern edge. Langmuir 27:3898-3905
8. Davis ME (2002) Ordered porous materials for emerging applications. Nature 417:813-821
9. del Campo A, Arzt E (2008) Fabrication approaches for generating complex micro- and nanopatterns on polymeric surfaces. Chem Rev 108:911-945
10. del Campo A, Greiner C (2007) SU-8: a photoresist for high-aspectratio and 3D submicron lithography. J Micromech Microeng 17:R81-R95
11. Doshi DA, Huesing NK, Lu M, Fan H, Lu Y, Simmons-Potter K, Potter BG, Hurd AJ, Brinker CJ (2000) Optically defined multifunctional patterning of photosensitive thin-film silica mesophases. Science 290:107-111
12. Eichelbaum M, Rademann K (2009) Plasmonic enhancement or energy transfer? on the luminescence of gold-, silver-, and lanthanide-doped silicate glasses and its potential for lightemitting devices. Adv Funct Mater 19:2045-2052
13. Eichelbaum M, Rademann K, Mueller R, Radtke M, Riesemeier H, Goerner W (2005) On the chemistry of gold in silicate glasses: studies on a nonthermally activated growth of gold nanoparticles. Angew Chem Int Ed 44:7905-7909
14. Eichelbaum M, Rademann K, Hoell A, Tatchev DM, Weigel W, Stoesser R, Pacchioni G (2008) Photoluminescence of atomic gold and silver particles in soda-lime silicate glasses. Nanotechnology 19:135701
15. Falcaro P, Innocenzi P (2011) X-rays to study, induce, and pattern structures in sol-gel materials. J Sol Gel Sci Technol 57:236-244
16. Falcaro P, Costacurta S, Malfatti L, Takahashi M, Kidchob T, Casula MF, Piccinini M, Marcelli A, Marmiroli B, Amenitsch H, Schiavuta P, Innocenzi P (2008) Fabrication of mesoporous functionalized arrays by integrating deep X-ray lithography with dip-pen writing. Adv Mater 20:1864-1869
17. Falcaro P, Malfatti L, Kidchob T, Giannini G, Falqui A, Casula MF, Amenitsch H, Marmiroli B, Grenci G, Innocenzi P (2009) Hierarchical porous silica films with ultralow refractive index. Chem Mater 21:2055-2061
18. Falcaro P, Hill AJ, Nairn KM, Jasieniak J, Mardel JI, Bastow TJ, Mayo SC, Gimona M, Gomez D, Whitfield HJ, Riccó R, Patelli A, Marmiroli B, Amenitsch H, Colson T, Villanova L, Buso D (2011) A new method to position and functionalize metalorganic framework crystals. Nature Commun 2:A237
19. Fan H, Lu Y, Stump A, Reed ST, Baer T, Schunk R, Perez-Luna V, Lopez GP, Brinker CJ (2000) Rapid prototyping of patterned functional nanostructures. Nature 405:56-60
20. Faustini M, Vayer M, Marmiroli B, Hillmyer M, Amenitsch H, Sinturel C, Grosso D (2010) Bottom-up approach toward titanosilicate mesoporous pillared planar nanochannels for nanofluidic applications. Chem Mater 22:5687-5694
21. Faustini M, Marmiroli B, Malfatti L, Louis B, Krins N, Falcaro P, Grenci G, Laberty-Robert C, Amenitsch H, Innocenzi P, Grosso D (2011) Direct nano-in-micropatterning of TiO2 thin layers and TiO2/Pt nanoelectrode arrays by deep X-ray lithography. J Mater Chem 21:3597-3603
22. Feigin LA, Svergun DI (1987) Structure analysis by small-angle X-Ray and neutron scattering. Plenum Press, New York and London
23. Goettert J, Moser HO, Pantenburg FJ, Saile V, Steininger R (2000) ANKA - a synchrotron light source for X-ray based micromachining. Microsyst Technol 6:113-116
24. Hozumi A, Cheng DF (2011) Facile micropatterning of mesoporous titania film by low-energy electron beam irradiation. Mater Chem Phys 129:464-470
25. Hozumi A, Kimura T (2008) Rapid micropatterning of mesoporous silica film by site-selective low-energy electron beam irradiation. Langmuir 24:11141-11146
26. Innocenzi P, Falcaro P, Schergna S, Maggini M, Menna E, Amenitsch H, Soler-Illia JAA, Grosso D, Sanchez C (2004) One-pot selfassembly of mesostructured silica films and membranes functionalized with fullerene derivatives. J Mater Chem 14:1838-1842
27. Innocenzi P, Kidchob T, Falcaro P, Takahashi M (2008) Patterning techniques for mesostructured films. Chem Mater 20:607-614
28. Lebeau B, Innocenzi P (2011) Hybrid materials for optics and photonics. Chem Soc Rev 40:886-906
29. Levine JR, Cohen B, Chung JW, Georgopoulos P (1989) Grazingincidence small-angle X-ray scattering: new tool for studying thin film growth. J Appl Crystallogr 22:528-532
30. Liu Y, Cui T, Coane PJ, Vasile MJ, Goettert J (2003) High-aspectratio microstructures fabricated by X-ray lithography of polymethylsilsesquioxane- based spin-on glass thick films. Microsyst Technol 9:171-175
31. Loechel B, Goettert J, Desta YM (2007) Direct LIGA service for prototyping: status report. Microsyst Technol 13:327-334
32. Lu Y, Yang Y, Sellinger A, Lu M, Huang J, Fan H, Haddad R, Lopez G, Burns AR, Sasaki DY, Shelnutt J, Brinker CJ (2001) Selfassembly of mesoscopically ordered chromatic polydiacetylene/ silica nanocomposites. Nature 410:913-917
33. Malfatti L, Marongiu D, Costacurta S, Falcaro P, Amenitsch H, Marmiroli B, Grenci G, Casula MF, Innocenzi P (2010) Writing self-assembled mesostructured films with in situ formation of gold nanoparticles. Chem Mater 22:2132-2137
34. Malfatti L, Falcaro P, Marmiroli B, Amenitsch H, Piccinini M, Falqui A, Innocenzi P (2011) Nanocomposite mesoporous ordered films for lab-on-chip intrinsic surface enhanced Raman scattering detection. Nanoscale 3:3760-3766
35. Marmiroli B, Grenci G, Cacho-Nerin F, Sartori B, Ferrari E, Laggner P, Businaro L, Amenitsch H (2009) Free jet micromixer to study fast chemical reactions by small-angle X-ray scattering. Lab Chip Miniat Chem Biol 9:2063-2069
36. Marmiroli B, Grenci G, Cacho-Nerin F, Sartori B, Laggner P, Businaro L, Amenitsch H (2010) Experimental set-up for time resolved small-angle X-ray scattering studies of nanoparticles formation using a free-jet micromixer. Nucl Instrum Methods Phys Res Sect B Beam Interact Mater Atoms 268:329-333
37. Martinez-Manez R, Sancenon F, Biyikal M, Hecht M, Rurack K (2011a) Mimicking tricks from nature with sensory organicinorganic hybrid materials. J Mater Chem 21:12588-12604
38. Martinez-Manez R, Sancenon F, Hecht M, Biyikal M, Rurack K (2011b) Nanoscopic optical sensors based on functional supramolecular hybrid materials. Anal Bioanalytical Chem 399:55-74
39. Melde BJ, Johnson BJ (2010) Mesoporous materials in sensing: morphology and functionality at the meso-interface. Anal Bioanalytical Chem 398:1565-1573
40. Nazmov V, Reznikova E, Mohr J (2011a) Investigation of the radiation-induced thermal flexure of an X-ray lithography mask during a tilted exposure. J Vac Sci Technol B Microelectron Nanometer Struct 29:0110071-0110077
41. Nazmov V, Reznikova E, Mohr J, Saile V, Vincze L, Vekemans B, Bohic S, Somogyi A (2011b) Parabolic crossed planar polymeric X-ray lenses. J Micromech Microeng 21:015020
42. Nie S, Emory SR (1997) Probing single molecules and single nanoparticles by surface-enhanced Raman scattering. Science 275:1102-1106
43. Otten A, Koster S, Struth B, Snigirev A, Pfohl T (2005) Microfluidics of soft matter investigated by small-angle X-ray scattering. J Synchrotron Radiat 12:745-750
44. Ozin GA, Cademartiri L (2009) Nanochemistry: what is next? Small 5:1240-1244
45. Panine P, Finet S, Weiss TM, Narayanan T (2006) Probing fast kinetics in complex fluids by combined rapid mixing and smallangle X-ray scattering. Adv Colloid Interface Sci 127:9-18
46. Perennes F, Vesselli E, Pantenburg FJ (2002) Deep X-ray lithography at ELETTRA using a central beam-stop to enhance adhesion. Microsyst Technol 8:330-334
47. Perennes F, Marmiroli B, Tormen M, Matteucci M, Di Fabrizio E (2006) Replication of deep X-ray lithography fabricated microstructures through casting of soft material. J Microlithogr Microfabr Microsyst 5:011007
48. Roder H, Maki K, Cheng H (2006) Early events in protein folding explored by rapid mixing methods. Chem Rev 106:1836-1861
49. Romanato F, Businaro L, Tormen M, Perennes F, Matteucci M, Marmiroli B, Balslev S, Di Fabrizio E (2006) Fabrication of 3D micro and nanostructures for MEMS and MOEMS: an approach based on combined lithographies. J Phys, Conf Ser 34:904-911
50. Saile V, Wallrabe U, Tabata O, Korvink JG (2009) Liga and its applications.Wiley-VCH Verlag GmbH&Co KGaA, Hoboken NJ
51. Scott BJ, Wirnsberger G, McGehee MD, Chmelka BF, Stucky GD (2001) Dye-doped mesostructured silica as a distributed feedback laser fabricated by soft lithography. Adv Mater 13:1231-1234
52. Sukhorukov GB, Volodkin DV, Guenther AM, Petrov AI, Shenoy DB, Moehwald H (2004) Porous calcium carbonate microparticles as templates for encapsulation of bioactive compounds. J Mater Chem 14:2073-2081
53. Tatchev D, Hoell A, Eichelbaum M, Rademann K (2011) X-rayassisted formation of gold nanoparticles in soda lime silicate glass: suppressed Ostwald ripening. Phys Rev Lett 106:085702
54. Tormen M, Grenci G, Marmiroli B, Romanato F (2011) X-ray lithography: fundamentals and applications. In: Stefan Landis (ed) Nano lithography. ISTE Ltd. and John Wiley & Sons, Inc., London and Hoboken, pp 1-86
55. Vyawahare S, Griffiths AD, Merten CA (2010) Miniaturization and parallelization of biological and chemical assays in microfluidic devices. Chem Biol 17:1052-1065
56. Walcarius A (2008) Electroanalytical applications of microporous zeolites and mesoporous (organo)silicas: recent trends. Electroanalysis 20:711-738
57. Walcarius A, Collinson MM (2009) Analytical chemistry with silica sol-gels: traditional routes to new materials for chemical analysis. Rev Anal Chem 2:121-143
58. Walcarius A, Kuhn A (2008) Ordered porous thin films in electrochemical analysis. Trends Anal Chem 27:593-603
59. Walcarius A, Mercier L (2010) Mesoporous organosilica adsorbents: nanoengineered materials for removal of organic and inorganic pollutants. J Mater Chem 20:4478-4511
60. Wang C, Jones RL, Lin EK, Wu WL, Rice BJ, Choi KW, Thompson G, Weigand SJ, Keane DT (2007) Characterization of correlated line edge roughness of nanoscale line gratings using small-angle X-ray scattering. J Appl Phys 102:024901
61. Wu CW, Aoki T, Kuwabara M (2004) Electron-beam lithography assisted patterning of surfactant-templated mesoporous thin films. Nanotechnology 15:1886-1889
62. Zschech E, Wyon C, Murray CE, Schneider G (2011) Devices, materials, and processes for nanoelectronics: characterization with advanced X-ray techniques using lab-based and synchrotron radiation sources. Adv Eng Mater 13:811-836