Replication of deep x-ray lithography fabricated microstructures through casting of soft material

Journal of Microlithography, Microfabrication and Microsystems

Volumn 5, Issue 1, 2006, Pages

  Perennes F ^a   Marmiroli, B ^b   Tormen, M ^b   Matteucci, M ^a   Di Fabrizio, E ^c  

^a SINCROTRONE TRIESTE   (Italy)

^b LABORATORIO TASC   (Italy)

^c UNIVERSITY MAGNA GRAECIA OF CATANZARO   (Italy)

Author keywords

Deep x ray lithography; Double casting; High aspect ratio; Polydimethylsiloxane; Polyvinyl alcohol

Indexed keywords

ASPECT RATIO; CASTING; MOLDS; PHOTOLITHOGRAPHY; POLYMETHYL METHACRYLATES; POLYVINYL ALCOHOLS; X RAY ANALYSIS;

DEEP X RAY LITHOGRAPHY; DOUBLE CASTING; POLYMETHYLSILOXANE (PDMS);

MICROSTRUCTURE;

EID: 33344466267     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2176730     Document Type: Article

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