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Volumn 21, Issue 11, 2011, Pages 3597-3603

Direct nano-in-micropatterning of TiO2 thin layers and TiO 2/Pt nanoelectrode arrays by deep X-ray lithography

(11) Faustini, Marco a Marmiroli, Benedetta b Malfatti, Luca c Louis, Benjamin a Krins, Natacha a Falcaro, Paolo d Grenci, Gianluca e Laberty Robert, Christel a Amenitsch, Heinz b Innocenzi, Plinio c Grosso, David a

a l'alimentation et l'Environnement (France)

b ERICH SCHMID INSTITUTE OF MATERIALS SCIENCE (Austria)

c UNIVERSITY OF SASSARI (Italy)

d CSIRO (Australia)

e LABORATORIO TASC (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BLOCK COPOLYMER MICELLES; BOTTOM-UP AND TOP-DOWN; DEEP X-RAY LITHOGRAPHY; DIP COATING; ELECTROCHEMICAL CHARACTERIZATIONS; FUNCTIONAL DEVICES; HETEROGENEOUS SUBSTRATES; MICRO PATTERNING; MICROPATTERNED; NANOELECTRODE ARRAY; ORGANIC/INORGANIC; PT ELECTRODE; SELECTIVE ETCHING; SILICON SURFACES; SOL GEL SOLUTIONS; TEMPLATING AGENTS; THIN LAYERS; TIO; TITANIA MEMBRANES; X RAY RADIATION;

BLOCK COPOLYMERS; PLATINUM; SUBSTRATES; THIN FILMS; TITANIUM DIOXIDE; X RAYS;

X RAY LITHOGRAPHY;

EID: 79952268562 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/c0jm03493b Document Type: Article

Times cited : (37)

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