Parabolic crossed planar polymeric x-ray lenses

Journal of Micromechanics and Microengineering

Volumn 21, Issue 1, 2011, Pages

  Nazmov, V ^a   Reznikova, E ^a   Mohr, J ^a   Saile, V ^a   Vincze, L ^b   Vekemans, B ^b   Bohic, S ^c   Somogyi, A ^d  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b GHENT UNIVERSITY   (Belgium)

^c EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^d SYNCHROTRON SOLEIL   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEEP X-RAY LITHOGRAPHY; FOCAL LENGTHS; INTENSITY GAIN; LENS MANUFACTURING; OPTICAL BEHAVIOR; PHOTON ENERGY; PRINCIPLES OF DESIGN; TWO DIRECTIONS; X RAY LENS;

BEHAVIORAL RESEARCH; MANUFACTURE; OPTICAL INSTRUMENT LENSES; POLYMERS; X RAYS;

X RAY LITHOGRAPHY;

EID: 78651477464     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/1/015020     Document Type: Article

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