Numerical and experimental study of residual stress of multilayer diamond-like carbon films prepared by filtered cathodic vacuum arc deposition

IEEE Transactions on Plasma Science

Volumn 40, Issue 9, 2012, Pages 2261-2266

  Xu, Zh Y ^a   Zheng, Y J ^a   Sun, H ^a   Leng, Yong Xiang ^a   Huang, N ^a  

^a SOUTHWEST JIAOTONG UNIVERSITY   (China)

Author keywords

Filtered cathodic vacuum arc (FCVA); finite element analysis; multilayer diamond like carbon (DLC) film; residual stress; tribological properties

Indexed keywords

BILAYER THICKNESS; DLC FILM; FILTERED CATHODIC VACUUM ARC; FILTERED CATHODIC VACUUM ARC DEPOSITION; FINITE ELEMENT SIMULATIONS; FINITE ELEMENT SOFTWARE; FINITE-ELEMENT TECHNIQUES; INTERFACIAL CRACKS; MODULATION PERIOD; MODULATION RATIO; NUMERICAL AND EXPERIMENTAL STUDY; OPTIMIZATION PROCESS; POTENTIAL APPLICATIONS; SI(1 0 0); SILICON SUBSTRATES; STRESS DECREASE; STRESS GENERATION; SUBSTRATE NEGATIVE BIAS; TI-6AL-4V; TRIBOLOGICAL PROPERTIES;

AMORPHOUS FILMS; CARBON; CARBON FILMS; DIAMOND LIKE CARBON FILMS; FINITE ELEMENT METHOD; HARDNESS; MODULATION; MULTILAYERS; RESIDUAL STRESSES; SILICON WAFERS; SYNTHETIC DIAMONDS; WEAR RESISTANCE;

MULTILAYER FILMS;

EID: 84866279679     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2012.2204068     Document Type: Article

References (40)

1. H. Dimigen, H. Hubsch, and R. Memming, "Tribological and electrical properties of metal-containing hydrogenated carbon films," Appl. Phys. Lett., vol. 50, no. 16, p. 1056, Apr. 1987.
2. J. Robertson, "Properties of diamond-like carbon," Surf. Coat. Technol., vol. 50, no. 3, pp. 185-203, Feb. 1992.
3. H.-C. Tsai and D. B. Bogy, "Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recording," J. Vac. Sci. Technol. A, vol. 5, no. 6, p. 3287, Nov. 1987.
4. A. A. Voevodin and J. S. Zabinski, "Superhard, functionally gradient, nanolayered and nanocomposite diamond-like carbon coatings for wear protection," Diamond Relat. Mater., vol. 7, no. 2-5, pp. 463-467, Feb. 1998.
5. J. Robertson, "Diamond-like amorphous carbon," Mater. Sci. Eng. R, Rep., vol. 37, no. 4-6, pp. 129-281, May 2002.
6. H. Nakazawa, T. Mikami, Y. Enta, M. Suemitsu, and M. Mashita, "Structure, chemical bonding and these thermal stabilities of Diamond-Like Carbon (DLC) films by RF magnetron sputtering," Jpn. J. Appl. Phys., vol. 42, no. 2, pp. L676-L679, 2003.
7. R. Lappalainen, H. Heinonen, A. Anttila, and S. Santavirta, "Some relevant issues related to the use of amorphous diamond coatings for medical applications," Diamond Relat. Mater., vol. 7, no. 2-5, pp. 482-485, Feb. 1998. (Pubitemid 128396889)
8. C. Dumkum, D.Mgrant, and I. R.McColl, "A multilayer approach to high adhesion diamond-like carbon coatings on titanium," Diamond Relat. Mater., vol. 6, no. 5-7, pp. 802-806, Apr. 1997. (Pubitemid 127421681)
9. L. J. Yu, X. Wang, X. H. Wang, and X. H. Liu, "Haemocompatibility of tetrahedral amorphous carbon films," Surf. Coat. Technol., vol. 128/129, pp. 484-488, Jun. 2000.
10. S. Xu, B. K. Tay, H. S. Tan, L. Zhong, and Y. Q. Tu, "Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy," J. Appl. Phys., vol. 79, no. 9, p. 7234, May 1996.
11. S. Xu, L. K. Cheah, J. R. Shi, Z. Sun, and B. K. Tay, "On the upper limit of content in tetrahedral amorphous carbon film," J. Phys., Condens. Matter, vol. 11, no. 1, p. 185, Jan. 1999.
12. T. A. Friedmann, J. P. Sullivan, J. A. Knapp, D. R. Tallant, D. M. Follstaedt, D. L. Medlin, and P. B. Mirkarimi, "Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond," Appl. Phys. Lett., vol. 71, no. 26, p. 3820, Dec. 1997.
13. Q. H. Fan, A. Fernandes, E. Pereira, and J. Grácio, "Adherent diamond coating on copper using an interlayer," Vacuum, vol. 52, no. 1/2, pp. 193-198, Jan. 1999.
14. C. Wei and C. H. Chen, "The effect of thermal and plastic mismatch on stress distribution in diamond like carbon film under different interlayer/substrate system," Diamond Relat. Mater., vol. 17, no. 7-10, pp. 1534-1540, Jul.-Oct. 2008.
15. J. Deng and M. Braum, "DLC multilayer coatings for wear protection," Diamond Relat. Mater., vol. 4, no. 7, pp. 936-943, May 1995.
16. A. A. Voevodin, M. A. Capano, S. J. P. Laube, M. S. Donley, and J. S. Zabinski, "Design of a Ti/TiC/DLC functionally gradient coating based on studies of structural transitions in Ti-C thin films," Thin Solid Films, vol. 298, no. 1/2, pp. 107-115, Apr. 1997. (Pubitemid 127442542)
17. A. A. Voevodin and J. S. Zabinski, "Superhard, functionally gradient, nanolayered and nanocomposite diamond-like carbon coatings for wear protection," Diamond Relat. Mater., vol. 7, no. 2-5, pp. 463-467, Feb. 1998.
18. H. Holleck, M. Lahres, and P. Woll, "Multilayer coatings-Influence of fabrication parameters on constitution and properties," Surf. Coat. Technol., vol. 41, no. 2, pp. 179-190, Apr. 1990. (Pubitemid 20684829)
19. K. Oguri and T. Arai, "Tribological properties and characterization of diamond-like carbon coatings with silicon prepared by plasma-assisted chemical vapour deposition," Surf. Coat. Technol., vol. 47, no. 1-3, pp. 710-721, Aug. 1991. (Pubitemid 21710885)
20. H. Dimigen, H. Hubsch, and R. Memming, "Tribological and electrical properties of metal?containing hydrogenated carbon films," Appl. Phys. Lett., vol. 50, no. 16, p. 1056, Apr. 1987.
21. W. P. Hsieh, D. Y. Wang, and F. S. Shieu, "Characterization of the Ti-doped diamond-like carbon coatings on a type 304 stainless steel," J. Vac. Sci. Technol. A, vol. 17, no. 3, p. 1053, May 1999.
22. Q. Wei, J. Sankar, and J. Narayan, "Structure and properties of novel functional diamond-like carbon coatings produced by laser ablation," Surf. Coat. Technol., vol. 146/147, pp. 250-257, Sep./Oct. 2001. (Pubitemid 34021176)
23. Y. H. Cheng, X. L. Qiao, J. G. Chen, Y. P. Wu, C. S. Xie, Y. Q. Wang, D. S. Xu, S. B. Mo, and Y. B. Sun, "Dependence of the composition and bonding structure of carbon nitride films deposited by direct current plasma assisted pulsed laser ablation on the deposition temperature," Diamond Relat. Mater., vol. 11, no. 8, pp. 1511-1517, Aug. 2002. (Pubitemid 34838184)
24. M. Chhowalla, Y. Yin, G. A. J. Amaratunga, and D. R.McKenzie, "Highly tetrahedral amorphous carbon films with low stress," Appl. Phys. Lett., vol. 69, no. 16, p. 2344, Oct. 1996.
25. C. Venkatraman, C. Brodbeck, and R. Lei, "Tribological properties of diamond-like nanocomposite coatings at high temperatures," Surf. Coat. Technol., vol. 115, no. 2/3, pp. 215-221, Jul. 1999. (Pubitemid 29466651)
26. M. P. Delplancke-Ogletree and O. R. Monteiro, "Wear behavior of diamond-like carbon/metal carbide multilayers," Surf. Coat. Technol., vol. 108/109, pp. 484-488, Oct. 1998. (Pubitemid 29170863)
27. M. P. Delplancke-Ogletree and O. R. Monteiro, "Wear behavior of diamond-like carbon/metal carbide multilayers," Surf. Coat. Technol., vol. 108-109, no. 1-3, pp. 484-488, Oct. 1998. (Pubitemid 29170863)
28. H. Ziegele, H. J. Scheibe, and B. Schultrich, "DLC and metallic nanometer multilayers deposited by laser-arc," Surf. Coat. Technol., vol. 97, no. 1-3, pp. 385-390, Dec. 1998. (Pubitemid 127442653)
29. J. Deng and M. Braun, "Residual stress and microhardness of DLC multilayer coatings," Diamond Relat. Mater., vol. 5, no. 3-5, pp. 478-482, Apr. 1996. (Pubitemid 126397258)
30. S. Anders and D. L. Callahan, "Multilayers of amorphous carbon prepared by cathodic arc deposition," Surf. Coat. Technol., vol. 94/95, pp. 189-194, Oct. 1997. (Pubitemid 127404521)
31. M. Gioti, S. Logothetidis, and C. Charitidis, "Stress relaxation and stability in thick amorphous carbon films deposited in layer structure," Appl. Phys. Lett., vol. 73, no. 2, p. 184, Jul. 1998.
32. S. Logothetidis, M. Gioti, C. Charitidis, and P. Patsalas, "A new process for the development of hard and stable sputtered amorphous carbon films," Vacuum, vol. 53, no. 1/2, pp. 61-65, May 1999.
33. J. W. Ager, III, S. Anders, I. G. Brown, M. Nastasi, and K. C. Walter, "Multilayer hard carbon films with low wear rates," Surf. Coat. Technol., vol. 91, no. 1/2, pp. 91-94, May 1997.
34. S. Anders and D. L. Callahan, "Multilayers of amorphous carbon prepared by cathodic arc deposition," Surf. Coat. Technol., vol. 94/95, pp. 189-194, Oct. 1997. (Pubitemid 127404521)
35. X. Lu, M. Li, X. Tang, and J. Lee, "Micromechanical properties of hydrogenated diamond-like carbon multilayers," Surf. Coat. Technol., vol. 201, no. 3/4, pp. 1679-1684, Oct. 2006. (Pubitemid 44362119)
36. X. Xu, B. K. Tay, H. S. Tan, L. Zhong, Y. Q. Tu, S. R. P. Silva, and W. I. Milne, "Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy," J. Appl. Phys., vol. 79, no. 9, pp. 7234-7239, May 1996.
37. S. Logothetidis, C. Charitides,M. Gioti, Y. Panayiotatos, M. Handrea, and W. Kautek, "Comprehensive study on the properties of multilayered amorphous carbon films," Diamond Relat. Mater., vol. 9, no. 3-6, pp. 756-760, Apr./May 2000. (Pubitemid 30400497)
38. F. Li, S. Zhang, J. Kong, Y. Zhang, and W. Zhang, "Multilayer DLC coatings via alternating bias during magnetron sputtering," Thin Solid Films, vol. 519, no. 15, pp. 4910-4916, May 2011.
39. D. Sheeja, B. K. Tay, S. P. Lau, and X. Shi, "Tribological properties and adhesive strength of DLC coatings prepared under different substrate bias voltages," Wear, vol. 249, no. 5/6, pp. 433-439, Jun. 2001. (Pubitemid 32621114)
40. J. K. Wright, R. L. Williamson, D. Renusch, P. Y. Hou, and R. M. Cannon, "Residual stresses in convoluted oxide scales," Mater. Sci. Eng. A, Struct. Mater. Prop. Microstruct. Process, vol. 262, no. 1/2, pp. 246-255, Apr. 1999.