Multilayer DLC coatings via alternating bias during magnetron sputtering

Thin Solid Films

Volumn 519, Issue 15, 2011, Pages 4910-4916

  Li, Fengji ^a   Zhang, Sam ^a   Kong, Junhua ^b   Zhang, Yujuan ^c   Zhang, Wali ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c HENAN UNIVERSITY   (China)

Author keywords

Diamond like carbon; Mechanical properties; Microstructure; Multilayer

Indexed keywords

ADHESION STRENGTHS; ATOMIC FORCE; BONDING STRUCTURE; COATING DENSITY; COATING THICKNESS; CROSS SECTIONAL IMAGE; CROSS-SECTIONAL MORPHOLOGY; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON COATINGS; DLC COATINGS; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; HARD LAYERS; LOW BIAS; MONOLAYER COATINGS; MULTILAYERED COATINGS; RAMAN SPECTRA; SMOOTH SURFACE; SPUTTERING DEPOSITION; SUBSTRATE BIAS;

ADHESION; ATOMIC FORCE MICROSCOPY; BOND STRENGTH (MATERIALS); DIAMONDS; FIELD EMISSION; FIELD EMISSION MICROSCOPES; HARDNESS; MONOLAYERS; MULTILAYERS; PHOTOELECTRON SPECTROSCOPY; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SURFACE MORPHOLOGY; THICKNESS MEASUREMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

HARD COATINGS;

EID: 79957641510     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.01.052     Document Type: Conference Paper

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