On the upper limit of sp3 content in tetrahedral amorphous carbon film

Journal of Physics Condensed Matter

Volumn 11, Issue 1, 1999, Pages 185-189

  Shi, X ^a   Cheah, L K ^a   Shi, J R ^a   Sun, Z ^a   Tay, B K ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010002821     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/11/1/015     Document Type: Article

References (18)

1. Martin P J, Filipczuk S W, Netterfield R P, Field J S, Whitnall D F and McKenzie D R 1988 J. Mater. Sci. Lett. 7 410
2. Martin P J, Netterfield R P, Kinder T J and Descotes L 1991 Surf. Coat. Technol. 49 239
3. McKenzie D R, Muller D and Pailthorpe B A 1991 Phys. Rev. Lett. 67 773
4. Falabella S, Boercker D B and Sanders D M 1993 Thin Solid Films 236 82
5. Fallon P J, Veerasamy V S, Davis C A, Robertson J, Amaratunga G A J, Milne W I and Koskinen J 1993 Phys. Rev. B 48 4777
6. Shi X, Tay B K, Tan H S, Li Zhong, Tu Y Q, Silva S R P and Milne W I 1996 J. Appl. Phys. 79 7239
7. Lifshitz Y, Lempert G D and Rotter S 1994 Diamond Relat. Mater. 3 542
8. Lossy R, Pappas D L, Roy R A, Doyle J P, Cuomo J J and Bruely J 1995 J. Appl. Phys. 77 4750
9. Pharr G M, Callahan D L, Mcadams S D, Tsui T Y, Anders S, Anders A, Ager J W, Brown I G, Singh C, Silva S R P and Robertson J 1996 Appl. Phys. Lett. 68 779
10. Lifshitz Y 1996 Diamond Relat. Mater. 5 388
11. Silva S R P, Shi Xu, Tay B K, Tan H S, Scheibe H J, Chhowalla M and Milne W I 1996 Thin Solid Films 290/291 317
12. Tay B K, Shi X, Cheah L K and Flynn D I 1997 Thin Solid Films 308/309 199
13. Shi Xu, Flynn D, Tay B K, Prawer S, Nugent K W, Silva S R P, Lifshitz Y and Milne W I 1997 Phil. Mag. B 76 351
14. Shi X, Flynn D, Tay B K and Tan H S 1995 Filtered Cathodic Arc Source patent PCT/GB96/00389
15. Shi X, Fulton M, Flynn D, Tay B K and Tan H S 1995 Deposition Apparatus patent PCT/GB96/00390
16. Cheah L K, Shi X, Shi J R, Liu E J and Silva S R P 1998 J. Non-Cryst. Solids at press
17. Lifshitz Y, Kasi S R and Rabalais J W 1989 Phys. Rev. Lett. 62 1290
18. Prawer S, Nugent K W, Lifshitz Y, Lempert G D, Grossman E, Kulik J, Avigal I and Kalish R 1996 Diamond Relat. Mater. 5 433