Micromechanical properties of hydrogenated diamond-like carbon multilayers

Surface and Coatings Technology

Volumn 201, Issue 3-4, 2006, Pages 1679-1684

  Lu, Xinchun ^a,b   Li, Ming ^a   Tang, Xiaoming ^a   Lee, Jonah ^b  

^a TSINGHUA UNIVERSITY   (China)

^b UNIVERSITY OF ALASKA FAIRBANKS   (United States)

Author keywords

Amorphous carbon; Diamond like carbon; Multilayers; Nano scratch; Nanoindentation

Indexed keywords

ADHESION; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; FRICTION; HARDNESS; HYDROGENATION; MECHANICAL PROPERTIES; MONOLAYERS; MULTILAYERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS; SINGLE CRYSTALS;

AMORPHOUS CARBON; NANO SCRATCH; NANOINDENTATION;

INORGANIC COATINGS;

ADHESION; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; FRICTION; HARDNESS; HYDROGENATION; INORGANIC COATINGS; MECHANICAL PROPERTIES; MONOLAYERS; MULTILAYERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS; SINGLE CRYSTALS;

EID: 33748520235     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.02.052     Document Type: Article

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