Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 59, Issue 8, 2012, Pages 1624-1631

  Chidambaram, Nachiappan ^a   Mazzalai, Andrea ^a   Muralt, Paul ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL ENERGY; ELECTRODE GAP; ENERGY HARVESTING DEVICE; FIGURE OF MERITS; HOMOGENEOUS FIELD; IN-PLANE ELECTRIC FIELDS; INTERDIGITATED ELECTRODES; LEAD ZIRCONATE TITANATE THIN FILMS; LONGITUDINAL EFFECT; ORIENTED SILICON; PARALLEL PLATES; PER UNIT; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC FILM; PZT; PZT FILM; PZT THIN FILM; SOL-GEL TECHNIQUE; STRAIN DEFORMATION; STRESS COMPONENT; STRESS STATE; SYSTEMATIC INVESTIGATIONS; TRANSVERSE EFFECTS; VIBRATION ENERGIES;

CHEMICAL SENSORS; ELECTRIC FIELDS; ENERGY HARVESTING; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; SILICON WAFERS; SOL-GELS; TENSILE STRESS; THIN FILMS;

INTEGRODIFFERENTIAL EQUATIONS;

EID: 84865329569     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2012.2368     Document Type: Article

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