MEMS interdigitated electrode pattern optimization for a unimorph piezoelectric beam

Journal of Electroceramics

Volumn 26, Issue 1-4, 2011, Pages 14-22

  Knight, Ryan R ^a   Mo, Changki ^b   Clark, William W ^a  

^a University of Pittsburgh   (United States)

^b WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

Electrode; Energy harvesting; Finite element analysis; Interdigitated; MEMS; Piezoelectric

Indexed keywords

DESIGN GUIDELINES; ELECTRODE DIMENSIONS; ELECTRODE PATTERN; FINITE ELEMENT MODELING; INTER-DIGITATED ELECTRODES; INTERDIGITATED; KEY FEATURE; PARAMETRIC STUDY; PIEZOELECTRIC; PIEZOELECTRIC BEAM; PIEZOELECTRIC LAYERS; PIEZOELECTRIC MEMS; SIMPLIFIED MODELS; UNIMORPH; VIBRATION ENERGIES;

ENERGY HARVESTING; FINITE ELEMENT METHOD; OPTIMIZATION; PIEZOELECTRIC DEVICES; TUNING;

PIEZOELECTRICITY;

EID: 80051664648     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-010-9621-8     Document Type: Article

References (37)

1. R. Sood, Y.B. Jeon, J.H. Jeong, S.G. Kim, Piezoelectric Micro Power Generators for Energy Harvesting (Technical Digest of the Solid-State Sensor and Actuator Workshop, Hilton Head USA, 2004)
2. Y.B. Jeon, R. Sood, J.H. Jeong, S.G. Kim, MEMS power generator with transverse mode thin film PZT. Sens Actuators A 122, 16-22 (2005) (Pubitemid 41037282)
3. W.J. Choi, Y. Jeon, R. Sood, S.G. Kim, Energy harvesting MEMS device based on thin film piezoelectric cantilevers. J Electroceram 17, 543-548 (2006)
4. D. Shen, J.H. Park, J. Vjitsaria, S.Y. Choe, H.C. Wikle, D.J. Kim, The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting. J Micromech Microeng 18, 055017 (2008). 7 pp
5. B.S. Lee, S.C. Lin, W.J. Wu, X.Y. Wang, P.Z. Chang, C.K. Lee, Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film. J Micromech Microeng 19, 065014 (2009). 8 pp
6. E.K. Reilly, P.K. Wright, Modeling, fabrication and stress compensation of an epitaxial thin film piezoelectric microscale energy scavenging device. J Micromech Microeng 19, 095014 (2009). 11 pp
7. Y.K. Hong, K.S. Moon, M. Levy, Single-crystal film piezoelectric sensors, actuators, and energy harvesters with interdigitated electrodes. Ferroelectric 342, 1-13 (2006)
8. S. John, J. Sirohi, G. Wang, "Comparison between PMN and PZT as a driving element in a compact hybrid actuator," in Proc. of ISSS, Vol. ISSS-2005/SA-15 (2005).
9. D.L. DeVoe, Piezoelectric thin film micromechanical beam resonators. Sens Actuators A 88, 263-272 (2001) (Pubitemid 32874310)
10. L. Li, P. Kumar, L. Calhoun, D.L. DeVoe, Piezoelectric Al0.3 Ga0.7As longitudinal mode beam resonators. J MEMS 15, 465-470 (2006) (Pubitemid 43891340)
11. G. Piazza, P.J. Stephanou, A.P. Pisano, One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing. Solid State Electron 51, 1596-1608 (2007) (Pubitemid 350138036)
12. C.L. Dai, C.H. Kuo, M.C. Chiang, Microelectromechanical resonator manufacturing using CMOS-MEMS technique. Microelectron J 38(6-7), 672-677 (2007)
13. R.M.C. Mestrom, R.H.B. Fey, J.T.M. van Beek, K.L. Phan, H. Nijmeijer, Modelling the dynamics of a MEMS resonator: Simulations and experiments. Sens Actuators A 142, 306-315 (2008) (Pubitemid 351199575)
14. J.L. Lopez, J. Verd, J. Teva, G. Murillo, J. Giner, F. Torres, A. Uranga, G. Abadel, N. Barniol, Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies. J Micromech Microeng 19, 015002 (2009). 10 pp
15. W. Pan, P. Soussan, B. Nauwelaers, A.C. Tilmans, A surface micromachined electrostatically tunable film bulk acoustic resonator. Sens Actuators A 126, 436-446 (2006) (Pubitemid 43165656)
16. H. Chandrahalim, S. A. Bhave, E. P. Quevy, R. T. Howe, "Aqueous transduction of poly-SiGe disk resonators," 14th Int. Conf. Solid-State Sensors, Actuators and Microsystems, 313-316 (2007).
17. H. Chandrahalim and S. A. Bhave, "Digitally-tunable MEMS filter using mechanically-coupled resonator array," IEEE conf. on MEMS, 1020-1023 (2008)
18. 3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators. Appl Phys Lett 93, 233504 (2008)
19. T. Kawakubo, T. Nagano, K. Abe, M. Nishigaki, T. Ono, "Piezoelectric MEMS element and tunable filter equipped with the piezoelectric MEMS element," US Patent Number 7,471,031 B2, (2008).
20. G. K. Ho, F. Ayazi, S. Pourkamali, K. Sundaresan, "Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and process relating thereto," US Patent Number 7,511,870 B2, (2009).
21. I. Zine-El-Abidine, P. Yang, A tunable mechanical resonator. J Micromech Microeng 19, 125004 (2009)
22. F. Nabki, K. Allidina, F. Ahmad, P.V. Cicek, M.N. El-Gamal, A Highly Integrated 1.8 GHz Frequency Synthesizer Based on a MEMS Resonator. IEEE J Solid State Circ 44(8), 2154-2168 (2009)
23. A.A. Frederick, Analysis and Fabrication of MEMS Tunable Piezoelectric Resonators (University of Pittsburgh, Pittsburgh, MS Thesis, 2006)
24. R. Knight, The Analysis and Testing of MEMS and Macro Scale Piezoelectric Devices (University of Pittsburgh, Pittsburgh, M.S. Thesis, 2007)
25. W.W. Clark, "Vibration Control with State-Switched Piezoelectric Materials," J. of Intelligent Material Systems and Structures, 11 (2000).
26. C. L. Davis, G. Lesieutre, J. Dosch, "A tunable electrically shunted piezoceramic vibration absorber," Proc. SPIE, 2045 (2003).
27. G. Lesieutre, G. Ottman, H. Hofmann, Damping as a result of piezoelectric energy harvesting. J Sound Vib 269, 991-1001 (2004)
28. M. Muriuki, An Investigation into the Design and Control of Tunable Piezoelectric Resonators (University of Pittsburgh, Pittsburgh, Ph.D Dissertation, 2004)
29. W. Wu, Y. Chen, B. Lee, J. He, Y. Peng, "Tunable resonant frequency power harvesting devices," Proc. of SPIE, Smart Structures and Materials, Damping and Isolation, 6169 (2006).
30. S. Kim, Low Power Energy Harvesting with Piezoelectric Generator (University of Pittsburgh, Pittsburgh, Ph.D Dissertation, 2002)
31. C. Mo, S. Kim, W. W. Clark, "Analysis of Power Generating Performance for Unimorph Cantilever Piezoelectric Beams with the Interdigitated Electrode," in Proc. of IDETC/CIE, (ASME, San Diego USA, 2005).
32. C. Mo, S. Kim, W.W. Clark, Theoretical analysis of energy harvesting performance for unimorph piezoelectric benders with interdigitated electrodes. Smart Struct Mater 18, 5 (2009)
33. H. A. Sodano, J. Lloyd, D. J. Inman, "An experimental comparison between several active composite actuators for power generation," in Proc. of SPIE on Smart Structures and Materials, (SPIE, San Diego USA, 2004), vol. 5390.
34. H.A. Sodano, D.J. Inman, G. Park, Comparison of piezoelectric energy harvesting devices for recharging batteries. J Intell Mater Syst Struct 16, 10 (2005)
35. ANSYS™, Coupled-Field Analysis Guide, Release 10.0 Documentation for ANSYS.
36. C.R. Bowen, L.J. Nelson, R. Stevens, Optimisation of interdigitated electrode for piezoelectric actuators and active fibre composites. J Electroceram 16, 263-269 (2006) (Pubitemid 44673878)
37. W. Becket, W. Kreher, Modelling piezoelectric modules with interdigitated electrode structures. Comput Mater Sci 26, 36-45 (2003)