Designing piezoelectric interdigitated microactuators using finite element analysis

Journal of Mechanical Design

Volumn 132, Issue 6, 2010, Pages 0610041-06100411

  Myers, Oliver J ^a   Anjanappa, M ^b   Freidhoff, C ^c  

^a MISSISSIPPI STATE UNIVERSITY   (United States)

^b UNIVERSITY OF MARYLAND BALTIMORE COUNTY   (United States)

^c NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

Microactuators; Modeling; Piezoelectric

Indexed keywords

DESIGN; MICROACTUATORS; PIEZOELECTRICITY;

CONSTANT COEFFICIENTS; D 33; DESIGN PARAMETERS; FINITE ELEMENT ANALYSE; MODELING; MULTI-PHYSICS; PARAMETRIC MODELS; PIEZOELECTRIC; PIEZOELECTRIC CONSTANT; SYMMETRICS;

FINITE ELEMENT METHOD;

EID: 77955214881     PISSN: 10500472     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.4001596     Document Type: Article

References (16)

1. Chen, B., Cheeseman, B., Safari, A., Danforth, S., and Chou, T., 2002, "Theoretical and Numerical Predictions of the Electromechanical Behavior of Spiral-Shaped Lead Zirconate Titanate (PZT) Actuators, " IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 49, pp. 319-326.
2. Brei, D., and Blechschmidt, J., 1992, "Design and Static Modeling of a Semi- circular Polymeric Piezoelectric Microactuator, " J. Microelectromech. Syst., 1, pp. 106-115.
3. Xu, S., and Koko, T., 2004, "Finite Element Analysis and Design of Actively Controlled Piezoelectric Smart Structures, " Finite Elem. Anal. Design, 40, pp. 241-262.
4. Young, W., and Budynas, R., 2002, Roark's Formulas for Stress and Strain, 7th ed., McGraw Hill, New York.
5. COMSOL, 2004, FEMLAB 3 Structural Mechanics Module.
6. Hong, E., Smith, R., Krishnaswamy, S. V., Freidhoff, C. B., and Trolier- McKinstry, S., 2006, "Residual Stress Development in PZT/ZrO/SiO Stacks for Piezoelectric Microactuators, " Thin Solid Films, 510, pp. 213-221.
7. Haan, S. I., Charalambides, P. G., Kuhn, J. L., and Patterson, M. C. L., 2003, "Supercritical Matrix Microcracking in Brittle Matrix Plain Weave Composites Under Uniaxial Tension, " Mech. Mater., 35(12), pp. 1107-1126.
8. Hong, E., Krishnaswamy, S. V., Freidhoff, C. B., and Trolier-McKinstry, S., 2002, "Fabrication of Piezoelectric Diaphragm Using Lead Zirconate Titanate (PZT) Films, " Proceedings of the Materials Research Society Symposium, Boston, MA, Paper No. 687.
9. 2000, CRC Materials Science and Engineering Handbook, 3rd ed., J. F. Shackelford and W. Alexander, eds., CRC Press, Boca Raton, FL.
10. Kuhn, J. L., Haan, S. I., and Charalambides, P. G., 2000, "Stress Induced Matrix Microcracking in Brittle Matrix Plain Weave Fabric Composites Under Uniaxial Tension, " J. Compos. Mater., 34(19), pp. 1640-1664.
11. Hong, Y. K., Park, H.-K., Lee, S. Q., Moon, K. S., Vanga, R. R., and Levy, M., 2004, "Design and Performance of a Self-Sensing, Self-Actuating Piezoelectric Monomorph With Interdigitated Electrodes, " Proceedings of the SPIE International Conference on Opto-Mechanical Actuators, Sensors and Control, Vol. 5602, pp. 210-217.
12. Hong, E., Trolier-McKinstry, S., Smith, R. L., Krishnaswamy, S. V., and Freidhoff, C. B., 2006, "Design of MEMS PZT Circular Diaphragm Actuators to Generate Large Deflections, " J. Microelectromech. Syst., 15(4), pp. 832-839.
13. Beneking, H., 1982, "Gain and Bandwidth of Fast Near-Infrared Photodetec- tors: A Comparison of Diodes, Phototransistors, and Photoconductive Devices, " IEEE Trans. Electron Devices, 29(9), pp. 1420-1431.
14. Moussa, W., 2006, "MEMS Design Optimization With FEA, "ALGOR Center for Mechanical Design Technology White Papers, www.algor.com
15. 2 Stacks for MEMS Piezoelectric Unimorph Diaphragms Using Interdigitated Transducer (IDT) Electrodes, Northrop Grumman Corporation, Baltimore, MD.
16. Freidhoff, C. B., 2003, "H3-Data, " Technical Report No. 4, Northrop Grumman Corporation.