Viscous damping of microcantilevers with modified surfaces and geometries

Applied Physics Letters

Volumn 101, Issue 6, 2012, Pages

  Ergincan, O ^a   Palasantzas, G ^a   Kooi, B J ^a  

^a UNIVERSITY OF GRONINGEN   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECT CALCULATION; FREQUENCY SHIFT; GAS PRESSURES; MICRO-CANTILEVERS; MODIFIED SURFACES; NOISE MEASUREMENTS; Q-FACTORS; QUALITY FACTOR Q; RESONANCE FREQUENCIES; RESONATING FREQUENCY; SURFACE CHANGES; VISCOUS DAMPING;

ATOMIC FORCE MICROSCOPY; ENERGY DISSIPATION; FREQUENCY SHIFT KEYING; Q FACTOR MEASUREMENT; SURFACE ROUGHNESS;

COMPOSITE MICROMECHANICS;

EID: 84865129010     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4744951     Document Type: Article

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