Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor

Microsystem Technologies

Volumn 18, Issue 7-8, 2012, Pages 905-915

  Wasisto, H S ^a   Merzsch, S ^a   Waag, A ^a   Kirsch, I ^b   Uhde, E ^b   Salthammer, T ^b   Peiner, E ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Wilhelm Klauditz Institut (WKI)   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER SENSORS; CARBON NANO PARTICLES; MASS SENSITIVITY; MICRO-CANTILEVERS; OPTICAL SENSING METHOD; PERSONAL EXPOSURES; PIEZO-RESISTIVE; QUALITY FACTORS; REAL TIME MONITORING; RESONANT FREQUENCY SHIFT; SELF-SENSING; SIGNAL READOUTS; SILICON CANTILEVER; TEMPERATURE COEFFICIENT; WHEATSTONE BRIDGES;

BRIDGE CIRCUITS; CARBON; CHEMICAL SENSORS; NANOCANTILEVERS; NANOPARTICLES;

NATURAL FREQUENCIES;

EID: 84864627394     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1405-9     Document Type: Conference Paper

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