Self-exciting and self-sensing resonant cantilever sensors for improved monitoring of airborne nanoparticles exposure

Proceedings of IEEE Sensors

Volumn , Issue , 2011, Pages 728-731

  Wasisto, H S ^a   Doering, L ^b   Merzsch, S ^a   Waag, A ^a   Uhde, E ^c   Peiner, E ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^c Wilhelm Klauditz Institut (WKI)   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AIRBORNE NANOPARTICLES; DIFFERENT MODES; FINITE ELEMENT MODELING; INTEGRATION DESIGN; MASS RESOLUTION; MONITORING DEVICE; PIEZO STACK; PIEZO-RESISTIVE CANTILEVERS; PIEZO-RESISTORS; PORTABLE MONITORING; QUALITY FACTORS; RESONANT CANTILEVER; RESONANT FREQUENCY SHIFT; RESONANT MODE; SELF-EXCITING; SELF-SENSING; SILICON CANTILEVER;

ELECTROSTATICS; NANOCANTILEVERS; NATURAL FREQUENCIES;

SENSORS;

EID: 84856874105     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2011.6127061     Document Type: Conference Paper

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