A resonant cantilever sensor for monitoring airborne nanoparticles

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1116-1119

  Wasisto, H S ^a   Merzsch, S ^a   Stranz, A ^a   Waag, A ^a   Kirsch, I ^b   Uhde, E ^b   Salthammer, T ^b   Peiner, E ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Wilhelm Klauditz Institut (WKI)   (Germany)

Author keywords

airborne nanoparticles; dielectrophoresis; Resonant cantilever sensor; resonant frequency

Indexed keywords

AIR-BORNE SENSORS; AIRBORNE NANOPARTICLES; CANTILEVER SENSORS; FREQUENCY SHIFT; FUNDAMENTAL RESONANT FREQUENCIES; MASS SENSITIVITY; PIEZO-RESISTIVE; PIEZOELECTRIC STACK ACTUATORS; QUALITY FACTORS; RESONANT CANTILEVER; RESONANT FREQUENCY SHIFT; SELF-SENSING; SENSOR SYSTEMS; STABLE CARBON; STRAIN GAUGE; TEMPERATURE COEFFICIENT;

ACTUATORS; ELECTROPHORESIS; FREQUENCY SHIFT KEYING; GAGES; MICROSYSTEMS; NANOPARTICLES; NATURAL FREQUENCIES; SOLID-STATE SENSORS; THERMAL CONDUCTIVITY;

NANOCANTILEVERS;

EID: 80052126955     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969233     Document Type: Conference Paper

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